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Ardeshir J. Sidhwa
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Scottsdale, AZ, US
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Patents Grants
last 30 patents
Information
Patent Grant
Method and structure of a thick metal layer using multiple depositi...
Patent number
8,222,138
Issue date
Jul 17, 2012
ST Microelectronics, Inc.
Ardeshir J. Sidhwa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Padded clamp ring with edge exclusion for deposition of thick AlCu/...
Patent number
7,927,424
Issue date
Apr 19, 2011
STMicroelectronics, Inc.
Ardeshir Jehangir Sidhwa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method and structure of a thick metal layer using multiple depositi...
Patent number
7,675,174
Issue date
Mar 9, 2010
STMicroelectronics, Inc.
Ardeshir J. Sidhwa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Elimination of junction spiking using soft sputter etch and two ste...
Patent number
6,365,496
Issue date
Apr 2, 2002
STMicroelectronics, Inc.
Ardeshir J. Sidhwa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for depositing an integrated circuit tungsten film stack tha...
Patent number
6,265,312
Issue date
Jul 24, 2001
STMicroelectronics, Inc.
Ardeshir Jehangir Sidhwa
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
METHOD AND STRUCTURE OF A THICK METAL LAYER USING MULTIPLE DEPOSITI...
Publication number
20100130006
Publication date
May 27, 2010
STMicroelectronics, Inc.
Ardeshir J. Sidhwa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Nucleation layer deposition on semiconductor process equipment parts
Publication number
20070032072
Publication date
Feb 8, 2007
STMicroelectronics Inc.
Ardeshir J. Sidhwa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Method and structure of a thick metal layer using multiple depositi...
Publication number
20040229458
Publication date
Nov 18, 2004
STMicroelectronics Inc.
Ardeshir J. Sidhwa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Padded clamp ring with edge exclusion for deposition of thick AlCu/...
Publication number
20030196604
Publication date
Oct 23, 2003
STMicroelectronics, Inc.
Ardeshir Jehangir Sidhwa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...