Ari Eiriksson

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Brighton, MA, US

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Patents Grantslast 30 patents

Information Patent Grant
Wafer grounding method for electrostatic clamps
- Patent number 7,952,851
- Issue date May 31, 2011
- Axcelis Technologies, Inc.
- Marvin R. LaFontaine
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Workpiece handling scan arm for ion implantation system
- Patent number 7,560,705
- Issue date Jul 14, 2009
- Axcelis Technologies, Inc.
- Ari Eiriksson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Uniform gas cushion wafer support
- Patent number 7,070,661
- Issue date Jul 4, 2006
- Axcelis Technologies, Inc.
- Ari Eiriksson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for positioning an elevator tube
- Patent number 7,026,581
- Issue date Apr 11, 2006
- Axcelis Technologies, Inc.
- Michel Pharand
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
WAFER GROUNDING METHOD FOR ELECTROSTATIC CLAMPS
- Publication number 20100110603
- Publication date May 6, 2010
- Axcelis Technologies, Inc.
- Marvin R. LaFontaine
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WORKPIECE HANDLING SCAN ARM FOR ION IMPLANTATION SYSTEM
- Publication number 20080105836
- Publication date May 8, 2008
- Ari Eiriksson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of positioning an elevator tube
- Publication number 20050042807
- Publication date Feb 24, 2005
- Axcelis Technologies, Inc.
- Michel Pharand
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Uniform gas cushion wafer support
- Publication number 20050039685
- Publication date Feb 24, 2005
- Axcelis Technologies, Inc.
- Ari Eiriksson
- H01 - BASIC ELECTRIC ELEMENTS