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Arjan Gijsbertsen
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Vucht, NL
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Patents Grants
last 30 patents
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Patent Grant
Apparatus and method for measuring substrate height
Patent number
11,662,669
Issue date
May 30, 2023
ASML Netherlands B.V.
Andrey Valerievich Rogachevskiy
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and method
Patent number
9,519,224
Issue date
Dec 13, 2016
ASML Netherlands B.V.
Arjan Gijsbertsen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
SUBSTRATE HOLDER, CARRIER SYSTEM COMPRISING A SUBSTRATE HOLDER AND...
Publication number
20230333488
Publication date
Oct 19, 2023
ASML NETHERLANDS B.V.
Krijn Frederik BUSTRAAN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
HEIGHT MEASUREMENT METHOD AND HEIGHT MEASUREMENT SYSTEM
Publication number
20230244153
Publication date
Aug 3, 2023
ASML NETHERLANDS B.V.
Andrey Valerievich ROGACHEVSKIY
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
SYSTEM AND METHOD FOR GENERATING LEVEL DATA FOR A SURFACE OF A SUBS...
Publication number
20230204352
Publication date
Jun 29, 2023
ASML NETHERLANDS B.V.
Arjan GIJSBERTSEN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD OF DETERMINING A MARK MEASUREMENT SEQUENCE, STAGE APPARATUS...
Publication number
20220260933
Publication date
Aug 18, 2022
ASML NETHERLANDS B.V.
István NAGY
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
APPARATUS AND METHOD FOR MEASURING SUBSTRATE HEIGHT
Publication number
20220244651
Publication date
Aug 4, 2022
ASML NETHERLANDS B.V.
Andrey Valerievich ROGACHEVSKIY
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic Apparatus and Method
Publication number
20140313496
Publication date
Oct 23, 2014
ASML NETHERLANDS B.V.
Arjan Gijsbertsen
G01 - MEASURING TESTING