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Arjan Johannes Anton Beukman
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Breda, NL
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last 30 patents
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Patent Grant
Metrology method and associated metrology and lithographic apparatuses
Patent number
11,906,906
Issue date
Feb 20, 2024
ASML Netherlands B.V.
Sebastianus Adrianus Goorden
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Position metrology apparatus and associated optical elements
Patent number
11,428,925
Issue date
Aug 30, 2022
ASML Netherlands B.V.
Arjan Johannes Anton Beukman
G01 - MEASURING TESTING
Patents Applications
last 30 patents
Information
Patent Application
METROLOGY APPARATUS AND LITHOGRAPHIC APPARATUS
Publication number
20240241452
Publication date
Jul 18, 2024
ASML NETHERLANDS B.V.
Arjan Johannes Anton Beukman
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METROLOGY METHOD AND APPARATUS
Publication number
20240231247
Publication date
Jul 11, 2024
ASML NETHERLANDS B.V.
Arjan Johannes Anton BEUKMAN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS, METROLOGY SYSTEMS, AND METHODS THEREOF
Publication number
20240036485
Publication date
Feb 1, 2024
ASML Netheriands B. V.
Arjan Johannes Anton BEUKMAN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
MONOLITHIC PARTICLE INSPECTION DEVICE
Publication number
20230266255
Publication date
Aug 24, 2023
ASML NETHERLANDS B.V.
Ilse VAN WEPEREN
G01 - MEASURING TESTING
Information
Patent Application
ILLUMINATION APPARATUS AND ASSOCIATED METROLOGY AND LITHOGRAPHIC AP...
Publication number
20230229094
Publication date
Jul 20, 2023
ASML NETHERLANDS B.V.
Simon Reinald HUISMAN
G02 - OPTICS
Information
Patent Application
LITHOGRAPHIC APPARATUS, MULTI-WAVELENGTH PHASE-MODULATED SCANNING M...
Publication number
20230213871
Publication date
Jul 6, 2023
ASML NETHERLANDS B.V.
Sebastianus Adrianus GOORDEN
G01 - MEASURING TESTING
Information
Patent Application
METROLOGY SYSTEMS, COHERENCE SCRAMBLER ILLUMINATION SOURCES AND MET...
Publication number
20220342228
Publication date
Oct 27, 2022
ASML NETHERLANDS B.V.
Irwan Dani SETIJA
G02 - OPTICS
Information
Patent Application
METROLOGY METHOD AND ASSOCIATED METROLOGY AND LITHOGRAPHIC APPARATUSES
Publication number
20220121128
Publication date
Apr 21, 2022
ASML NETHERLANDS B.V.
Sebastianus Adrianus GOORDEN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Position Metrology Apparatus and Associated Optical Elements
Publication number
20200209608
Publication date
Jul 2, 2020
ASML NETHERLANDS B.V.
Arjan Johannes Anton Beukman
G02 - OPTICS