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Arjen Benjamin Storm
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Leuven, BE
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Patents Grants
last 30 patents
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Patent Grant
Method and installation for etching a substrate
Patent number
6,884,317
Issue date
Apr 26, 2005
ASM International, N.V.
Hessel Sprey
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
Method and installation for etching a substrate
Publication number
20010015343
Publication date
Aug 23, 2001
Hessel Sprey
H01 - BASIC ELECTRIC ELEMENTS