Arkadiy I. Shimanovich

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San Francisco, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for sealing substrate load port in a high pres...
- Patent number 7,105,061
- Issue date Sep 12, 2006
- Novellus Systems, Inc.
- Krishnan Shrinivasan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Measurement of substrate temperature in a process chamber using non...
- Patent number 6,563,092
- Issue date May 13, 2003
- Novellus Systems, Inc.
- Krishnan Shrinivasan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for removing post-etch residues and other adhe...
- Patent number 6,333,268
- Issue date Dec 25, 2001
- Novellus Systems, Inc.
- Vladimir Starov
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY