Arkaprava Dan

Person

San Jose, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Dithering or dynamic offsets for improved uniformity
- Patent number 12,077,861
- Issue date Sep 3, 2024
- Applied Materials, Inc.
- Joseph AuBuchon
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
PEALD titanium nitride with direct microwave plasma
- Patent number 11,823,870
- Issue date Nov 21, 2023
- Applied Materials, Inc.
- Hanhong Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods of controlling gas pressure in gas-pulsing-based precursor...
- Patent number 11,791,172
- Issue date Oct 17, 2023
- Applied Materials, Inc.
- Mauro Cimino
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and methods for real-time wafer chucking detection
- Patent number 11,791,190
- Issue date Oct 17, 2023
- Applied Materials, Inc.
- Tejas Ulavi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of tuning film properties of metal nitride using plasma
- Patent number 11,646,226
- Issue date May 9, 2023
- Applied Materials, Inc.
- Wenyi Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
In-situ DC plasma for cleaning pedestal heater
- Patent number 11,623,253
- Issue date Apr 11, 2023
- Applied Materials, Inc.
- Tejas Ulavi
- B08 - CLEANING
Information Patent Grant
Method for auto-tuning and process performance assessment of chambe...
- Patent number 11,599,069
- Issue date Mar 7, 2023
- Applied Materials, Inc.
- Mauro Cimino
- G05 - CONTROLLING REGULATING
Information Patent Grant
In-situ DC plasma for cleaning pedestal heater
- Patent number 11,260,432
- Issue date Mar 1, 2022
- Applied Materials, Inc.
- Tejas Ulavi
- B08 - CLEANING
Information Patent Grant
Complementary pattern station designs
- Patent number 11,220,747
- Issue date Jan 11, 2022
- Applied Materials, Inc.
- Joseph AuBuchon
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
DITHERING OR DYNAMIC OFFSETS FOR IMPROVED UNIFORMITY
- Publication number 20240352586
- Publication date Oct 24, 2024
- Applied Materials, Inc.
- Joseph AuBuchon
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS OF GROWING METAL-CONTAINING FILMS
- Publication number 20230295803
- Publication date Sep 21, 2023
- Applied Materials, Inc.
- Haoming Yan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PEALD TITANIUM NITRIDE WITH DIRECT MICROWAVE PLASMA
- Publication number 20230253186
- Publication date Aug 10, 2023
- Applied Materials, Inc.
- Hanhong Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF TUNING FILM PROPERTIES OF METAL NITRIDE USING PLASMA
- Publication number 20230245925
- Publication date Aug 3, 2023
- Applied Materials, Inc.
- Wenyi LIU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR AUTO-TUNING AND PROCESS PERFORMANCE ASSESSMENT OF CHAMBE...
- Publication number 20230071431
- Publication date Mar 9, 2023
- Applied Materials, Inc.
- Mauro Cimino
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
In-Situ DC Plasma For Cleaning Pedestal Heater
- Publication number 20220152668
- Publication date May 19, 2022
- Applied Materials, Inc.
- Tejas Ulavi
- B08 - CLEANING
Information Patent Application
METHODS OF CONTROLLING GAS PRESSURE IN GAS-PULSING-BASED PRECURSOR...
- Publication number 20210398823
- Publication date Dec 23, 2021
- Applied Materials, Inc.
- Mauro Cimino
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF TUNING FILM PROPERTIES OF METAL NITRIDE USING PLASMA
- Publication number 20210351071
- Publication date Nov 11, 2021
- Applied Materials, Inc.
- Wenyi LIU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Apparatus and Methods for Real-Time Wafer Chucking Detection
- Publication number 20210351060
- Publication date Nov 11, 2021
- Applied Materials, Inc.
- Tejas Ulavi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Dithering Or Dynamic Offsets For Improved Uniformity
- Publication number 20210087681
- Publication date Mar 25, 2021
- Applied Materials, Inc.
- Joseph AuBuchon
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
In-Situ DC Plasma For Cleaning Pedestal Heater
- Publication number 20210086239
- Publication date Mar 25, 2021
- Applied Materials, Inc.
- Tejas Ulavi
- B08 - CLEANING
Information Patent Application
PEALD TITANIUM NITRIDE WITH DIRECT MICROWAVE PLASMA
- Publication number 20210050186
- Publication date Feb 18, 2021
- Applied Materials, Inc.
- Hanhong Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Complementary Pattern Station Designs
- Publication number 20200131636
- Publication date Apr 30, 2020
- Applied Materials, Inc.
- Joseph AuBuchon
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Methods Of Operating A Spatial Deposition Tool
- Publication number 20200090978
- Publication date Mar 19, 2020
- Joseph AuBuchon
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Methods Of Operating A Spatial Deposition Tool
- Publication number 20200066572
- Publication date Feb 27, 2020
- Applied Materials, Inc.
- Joseph AuBuchon
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Arkaprava Dan

Person

Patents Grantslast 30 patents

Dithering or dynamic offsets for improved uniformity

PEALD titanium nitride with direct microwave plasma

Methods of controlling gas pressure in gas-pulsing-based precursor...

Apparatus and methods for real-time wafer chucking detection

Method of tuning film properties of metal nitride using plasma

In-situ DC plasma for cleaning pedestal heater

Method for auto-tuning and process performance assessment of chambe...

In-situ DC plasma for cleaning pedestal heater

Complementary pattern station designs

Patents Applicationslast 30 patents

DITHERING OR DYNAMIC OFFSETS FOR IMPROVED UNIFORMITY

METHODS OF GROWING METAL-CONTAINING FILMS

PEALD TITANIUM NITRIDE WITH DIRECT MICROWAVE PLASMA

METHOD OF TUNING FILM PROPERTIES OF METAL NITRIDE USING PLASMA

METHOD FOR AUTO-TUNING AND PROCESS PERFORMANCE ASSESSMENT OF CHAMBE...

In-Situ DC Plasma For Cleaning Pedestal Heater

METHODS OF CONTROLLING GAS PRESSURE IN GAS-PULSING-BASED PRECURSOR...

METHOD OF TUNING FILM PROPERTIES OF METAL NITRIDE USING PLASMA

Apparatus and Methods for Real-Time Wafer Chucking Detection

Dithering Or Dynamic Offsets For Improved Uniformity

In-Situ DC Plasma For Cleaning Pedestal Heater

PEALD TITANIUM NITRIDE WITH DIRECT MICROWAVE PLASMA

Complementary Pattern Station Designs

Methods Of Operating A Spatial Deposition Tool

Methods Of Operating A Spatial Deposition Tool