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Armand Eugene Albert Koolen
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Eindhoven, NL
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Patents Grants
last 30 patents
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Patent Grant
Method of determining an illumination profile and device manufactur...
Patent number
7,425,397
Issue date
Sep 16, 2008
ASML Netherlands B.V.
Jozef Maria Finders
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method for determining parameters for lithographic projection, a co...
Patent number
7,026,082
Issue date
Apr 11, 2006
ASML Netherlands B.V.
Markus Franciscus Antonius Eurlings
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
6,958,806
Issue date
Oct 25, 2005
ASML Netherlands B.V.
Heine Melle Mulder
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
Metrology Method and Apparatus, Lithographic Apparatus, Device Manu...
Publication number
20110043791
Publication date
Feb 24, 2011
ASML NETHERLANDS B.V.
Hendrik Jan Hidde Smilde
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Inspection Method and Apparatus, Lithographic Apparatus, Lithograph...
Publication number
20100315613
Publication date
Dec 16, 2010
ASML NETHERLANDS B.V.
Johannes Matheus Marie DE WIT
G01 - MEASURING TESTING
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Patent Application
Method of determining an illumination profile and device manufactur...
Publication number
20070059614
Publication date
Mar 15, 2007
ASML NETHERLANDS B.V.
Jozef Maria Finders
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY