Armen Avoyan

Person

Glendale, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Chamber component cleanliness measurement system
- Patent number 12,072,318
- Issue date Aug 27, 2024
- Lam Research Corporation
- Amir A. Yasseri
- B08 - CLEANING
Information Patent Grant
Conditioning chamber component
- Patent number 12,064,795
- Issue date Aug 20, 2024
- Lam Research Corporation
- Amir A. Yasseri
- B08 - CLEANING
Information Patent Grant
Conditioning chamber component
- Patent number 10,967,407
- Issue date Apr 6, 2021
- Lam Research Corporation
- Amir A. Yasseri
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic chuck cleaning fixture
- Patent number 10,391,526
- Issue date Aug 27, 2019
- Lam Research Corporation
- Armen Avoyan
- B08 - CLEANING
Information Patent Grant
Dual phase cleaning chambers and assemblies comprising the same
- Patent number 9,748,078
- Issue date Aug 29, 2017
- Lam Research Corporation
- Armen Avoyan
- B08 - CLEANING
Information Patent Grant
Dielectric window cleaning apparatuses
- Patent number 9,623,449
- Issue date Apr 18, 2017
- Lam Research Corporation
- Armen Avoyan
- B08 - CLEANING
Information Patent Grant
Portable sonic particle removal tool with a chemically controlled w...
- Patent number 9,505,036
- Issue date Nov 29, 2016
- Lam Research Corporation
- Armen Avoyan
- B08 - CLEANING
Information Patent Grant
Wet clean process for cleaning plasma processing chamber components
- Patent number 9,406,534
- Issue date Aug 2, 2016
- Lam Research Corporation
- Armen Avoyan
- B08 - CLEANING
Information Patent Grant
Methods for mixed acid cleaning of showerhead electrodes
- Patent number 9,396,912
- Issue date Jul 19, 2016
- Lam Research Corporation
- Armen Avoyan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas injector particle removal process and apparatus
- Patent number 9,390,895
- Issue date Jul 12, 2016
- Lam Research Corporation
- Cliff LaCroix
- B08 - CLEANING
Information Patent Grant
Mixed acid cleaning assemblies
- Patent number 9,293,305
- Issue date Mar 22, 2016
- Lam Research Corporation
- Armen Avoyan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Dual phase cleaning chambers and assemblies comprising the same
- Patent number 9,245,719
- Issue date Jan 26, 2016
- Lam Research Corporation
- Armen Avoyan
- B08 - CLEANING
Information Patent Grant
Platen and adapter assemblies for facilitating silicon electrode po...
- Patent number 9,120,201
- Issue date Sep 1, 2015
- Lam Research Corporation
- Armen Avoyan
- B24 - GRINDING POLISHING
Information Patent Grant
Methodology for cleaning of surface metal contamination from an upp...
- Patent number 9,079,228
- Issue date Jul 14, 2015
- Lam Research Corporation
- Hong Shih
- B08 - CLEANING
Information Patent Grant
System and method for cleaning gas injectors
- Patent number 8,945,317
- Issue date Feb 3, 2015
- Lam Research Corporation
- Armen Avoyan
- B08 - CLEANING
Information Patent Grant
Electrode carrier assemblies
- Patent number 8,580,079
- Issue date Nov 12, 2013
- Lam Research Corporation
- Cliff La Croix
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Platen and adapter assemblies for facilitating silicon electrode po...
- Patent number 8,550,880
- Issue date Oct 8, 2013
- Lam Research Corporation
- Armen Avoyan
- B24 - GRINDING POLISHING
Information Patent Grant
Method of cleaning aluminum plasma chamber parts
- Patent number 8,545,639
- Issue date Oct 1, 2013
- Lam Research Corporation
- Hong Shih
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Grant
Electrode securing platens and electrode polishing assemblies incor...
- Patent number 8,444,456
- Issue date May 21, 2013
- Lam Research Corporation
- Cliff La Croix
- B24 - GRINDING POLISHING
Information Patent Grant
Electrode transporter and fixture sets incorporating the same
- Patent number 8,276,898
- Issue date Oct 2, 2012
- Lam Research Corporation
- Armen Avoyan
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Peripherally engaging electrode carriers and assemblies incorporati...
- Patent number 8,276,604
- Issue date Oct 2, 2012
- Lam Research Corporation
- Jason Augustino
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cleaning of bonded silicon electrodes
- Patent number 8,221,552
- Issue date Jul 17, 2012
- Lam Research Corporation
- Duane Outka
- B08 - CLEANING
Information Patent Grant
Methods and apparatus for wet cleaning electrode assemblies for pla...
- Patent number 8,215,321
- Issue date Jul 10, 2012
- Lam Research Corporation
- Hong Shih
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Backside mounted electrode carriers and assemblies incorporating th...
- Patent number 8,171,877
- Issue date May 8, 2012
- Lam Research Corporation
- Jason Augustino
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Immersive oxidation and etching process for cleaning silicon electr...
- Patent number 8,075,703
- Issue date Dec 13, 2011
- Lam Research Corporation
- Armen Avoyan
- B24 - GRINDING POLISHING
Information Patent Grant
Processes for reconditioning multi-component electrodes
- Patent number 8,075,701
- Issue date Dec 13, 2011
- Lam Research Corporation
- Armen Avoyan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for inspecting electrostatic chucks with Kelvin probe analysis
- Patent number 8,022,718
- Issue date Sep 20, 2011
- Lam Research Corporation
- Armen Avoyan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and apparatus for wet cleaning electrode assemblies for pla...
- Patent number 7,942,973
- Issue date May 17, 2011
- Lam Research Corporation
- Hong Shih
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methodology for cleaning of surface metal contamination from electr...
- Patent number 7,578,889
- Issue date Aug 25, 2009
- Lam Research Corporation
- Hong Shih
- B08 - CLEANING
Information Patent Grant
Wet cleaning of electrostatic chucks
- Patent number 7,052,553
- Issue date May 30, 2006
- Lam Research Corporation
- Hong Shih
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
CONDITIONING CHAMBER COMPONENT
- Publication number 20240383017
- Publication date Nov 21, 2024
- LAM RESEARCH CORPORATION
- Amir A. YASSERI
- B08 - CLEANING
Information Patent Application
CHAMBER COMPONENT CLEANLINESS MEASUREMENT SYSTEM
- Publication number 20220252548
- Publication date Aug 11, 2022
- LAM RESEARCH CORPORATION
- Amir A. YASSERI
- B08 - CLEANING
Information Patent Application
CONDITIONING CHAMBER COMPONENT
- Publication number 20210205858
- Publication date Jul 8, 2021
- LAM RESEARCH CORPORATION
- Amir A. YASSERI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONDITIONING CHAMBER COMPONENT
- Publication number 20180318890
- Publication date Nov 8, 2018
- LAM RESEARCH CORPORATION
- Amir A. YASSERI
- B08 - CLEANING
Information Patent Application
DUAL PHASE CLEANING CHAMBERS AND ASSEMBLIES COMPRISING THE SAME
- Publication number 20160141153
- Publication date May 19, 2016
- LAM RESEARCH CORPORATION
- Armen Avoyan
- B08 - CLEANING
Information Patent Application
Wet Clean Process for Cleaning Plasma Processing Chamber Components
- Publication number 20160079096
- Publication date Mar 17, 2016
- LAM RESEARCH CORPORATION
- Armen Avoyan
- B08 - CLEANING
Information Patent Application
ELECTROSTATIC CHUCK CLEANING FIXTURE
- Publication number 20150165492
- Publication date Jun 18, 2015
- LAM RESEARCH CORPORATION
- Armen Avoyan
- B08 - CLEANING
Information Patent Application
GAS INJECTOR PARTICLE REMOVAL PROCESS AND APPARATUS
- Publication number 20150000712
- Publication date Jan 1, 2015
- LAM RESEARCH CORPORATION
- Cliff LaCroix
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
PORTABLE SONIC PARTICLE REMOVAL TOOL WITH A CHEMICALLY CONTROLLED W...
- Publication number 20140261575
- Publication date Sep 18, 2014
- LAM RESEARCH CORPORATION
- Armen Avoyan
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Application
PLATEN AND ADAPTER ASSEMBLIES FOR FACILITATING SILICON ELECTRODE PO...
- Publication number 20140030966
- Publication date Jan 30, 2014
- LAM RESEARCH CORPORATION
- Armen Avoyan
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Application
Dielectric Window Cleaning Apparatuses
- Publication number 20130263897
- Publication date Oct 10, 2013
- LAM RESEARCH CORPORATION
- Armen Avoyan
- B08 - CLEANING
Information Patent Application
SYSTEM AND METHOD FOR CLEANING GAS INJECTORS
- Publication number 20130146095
- Publication date Jun 13, 2013
- LAM RESEARCH CORPORATION
- Armen Avoyan
- B08 - CLEANING
Information Patent Application
METHOD OF CLEANING ALUMINUM PLASMA CHAMBER PARTS
- Publication number 20130104930
- Publication date May 2, 2013
- LAM RESEARCH CORPORATION
- Hong Shih
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Application
Methods For Mixed Acid Cleaning Of Showerhead Electrodes
- Publication number 20130104938
- Publication date May 2, 2013
- LAM RESEARCH CORPORATION
- Armen Avoyan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Mixed Acid Cleaning Assemblies
- Publication number 20130104942
- Publication date May 2, 2013
- LAM RESEARCH CORPORATION
- Armen Avoyan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Dual Phase Cleaning Chambers and Assemblies Comprising The Same
- Publication number 20130019907
- Publication date Jan 24, 2013
- LAM RESEARCH CORPORATION
- Armen Avoyan
- B08 - CLEANING
Information Patent Application
Electrode Securing Platens And Electrode Polishing Assemblies Incor...
- Publication number 20120108152
- Publication date May 3, 2012
- LAM RESEARCH CORPORATION
- Cliff La Croix
- B24 - GRINDING POLISHING
Information Patent Application
BACKSIDE MOUNTED ELECTRODE CARRIERS AND ASSEMBLIES INCORPORATING TH...
- Publication number 20120013242
- Publication date Jan 19, 2012
- LAM RESEARCH CORPORATION
- Jason Augustino
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Electrode Carrier Assemblies
- Publication number 20110308732
- Publication date Dec 22, 2011
- LAM RESEARCH CORPORATION
- Cliff La Croix
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND APPARATUS FOR WET CLEANING ELECTRODE ASSEMBLIES FOR PLA...
- Publication number 20110180117
- Publication date Jul 28, 2011
- LAM RESEARCH CORPORATION
- Hong Shih
- B08 - CLEANING
Information Patent Application
METHODOLOGY FOR CLEANING OF SURFACE METAL CONTAMINATION FROM AN UPP...
- Publication number 20110146704
- Publication date Jun 23, 2011
- LAM RESEARCH CORPORATION
- Hong Shih
- B08 - CLEANING
Information Patent Application
IMMERSIVE OXIDATION AND ETCHING PROCESS FOR CLEANING SILICON ELECTR...
- Publication number 20100139692
- Publication date Jun 10, 2010
- LAM RESEARCH CORPORATION
- Armen Avoyan
- B08 - CLEANING
Information Patent Application
PLATEN AND ADAPTER ASSEMBLIES FOR FACILITATING SILICON ELECTRODE PO...
- Publication number 20100144246
- Publication date Jun 10, 2010
- LAM RESEARCH CORPORATION
- Armen Avoyan
- B08 - CLEANING
Information Patent Application
METHOD FOR INSPECTING ELECTROSTATIC CHUCKS WITH KELVIN PROBE ANALYSIS
- Publication number 20100045316
- Publication date Feb 25, 2010
- LAM RESEARCH CORPORATION
- ARMEN AVOYAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESSES FOR RECONDITIONING MULTI-COMPONENT ELECTRODES
- Publication number 20090325320
- Publication date Dec 31, 2009
- LAM RESEARCH CORPORATION
- Armen Avoyan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PERIPHERALLY ENGAGING ELECTRODE CARRIERS AND ASSEMBLIES INCORPORATI...
- Publication number 20090321018
- Publication date Dec 31, 2009
- LAM RESEARCH CORPORATION
- Jason Augustino
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BACKSIDE MOUNTED ELECTRODE CARRIERS AND ASSEMBLIES INCORPORATING TH...
- Publication number 20090322199
- Publication date Dec 31, 2009
- LAM RESEARCH CORPORATION
- Jason Augustino
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRODE TRANSPORTER AND FIXTURE SETS INCORPORATING THE SAME
- Publication number 20090311079
- Publication date Dec 17, 2009
- LAM RESEARCH CORPORATION
- Armen Avoyan
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Methodology for cleaning of surface metal contamination from electr...
- Publication number 20080236620
- Publication date Oct 2, 2008
- LAM RESEARCH CORPORATION
- Hong Shih
- B08 - CLEANING
Information Patent Application
Cleaning of bonded silicon electrodes
- Publication number 20080236618
- Publication date Oct 2, 2008
- LAM RESEARCH CORPORATION
- Duane Outka
- B08 - CLEANING

Armen Avoyan

Person

Patents Grantslast 30 patents

Chamber component cleanliness measurement system

Conditioning chamber component

Conditioning chamber component

Electrostatic chuck cleaning fixture

Dual phase cleaning chambers and assemblies comprising the same

Dielectric window cleaning apparatuses

Portable sonic particle removal tool with a chemically controlled w...

Wet clean process for cleaning plasma processing chamber components

Methods for mixed acid cleaning of showerhead electrodes

Gas injector particle removal process and apparatus

Mixed acid cleaning assemblies

Dual phase cleaning chambers and assemblies comprising the same

Platen and adapter assemblies for facilitating silicon electrode po...

Methodology for cleaning of surface metal contamination from an upp...

System and method for cleaning gas injectors

Electrode carrier assemblies

Platen and adapter assemblies for facilitating silicon electrode po...

Method of cleaning aluminum plasma chamber parts

Electrode securing platens and electrode polishing assemblies incor...

Electrode transporter and fixture sets incorporating the same

Peripherally engaging electrode carriers and assemblies incorporati...

Cleaning of bonded silicon electrodes

Methods and apparatus for wet cleaning electrode assemblies for pla...

Backside mounted electrode carriers and assemblies incorporating th...

Immersive oxidation and etching process for cleaning silicon electr...

Processes for reconditioning multi-component electrodes

Method for inspecting electrostatic chucks with Kelvin probe analysis

Methods and apparatus for wet cleaning electrode assemblies for pla...

Methodology for cleaning of surface metal contamination from electr...

Wet cleaning of electrostatic chucks

Patents Applicationslast 30 patents

CONDITIONING CHAMBER COMPONENT

CHAMBER COMPONENT CLEANLINESS MEASUREMENT SYSTEM

CONDITIONING CHAMBER COMPONENT

CONDITIONING CHAMBER COMPONENT

DUAL PHASE CLEANING CHAMBERS AND ASSEMBLIES COMPRISING THE SAME

Wet Clean Process for Cleaning Plasma Processing Chamber Components

ELECTROSTATIC CHUCK CLEANING FIXTURE

GAS INJECTOR PARTICLE REMOVAL PROCESS AND APPARATUS

PORTABLE SONIC PARTICLE REMOVAL TOOL WITH A CHEMICALLY CONTROLLED W...

PLATEN AND ADAPTER ASSEMBLIES FOR FACILITATING SILICON ELECTRODE PO...

Dielectric Window Cleaning Apparatuses

SYSTEM AND METHOD FOR CLEANING GAS INJECTORS

METHOD OF CLEANING ALUMINUM PLASMA CHAMBER PARTS

Methods For Mixed Acid Cleaning Of Showerhead Electrodes

Mixed Acid Cleaning Assemblies

Dual Phase Cleaning Chambers and Assemblies Comprising The Same

Electrode Securing Platens And Electrode Polishing Assemblies Incor...

BACKSIDE MOUNTED ELECTRODE CARRIERS AND ASSEMBLIES INCORPORATING TH...

Electrode Carrier Assemblies

METHODS AND APPARATUS FOR WET CLEANING ELECTRODE ASSEMBLIES FOR PLA...

METHODOLOGY FOR CLEANING OF SURFACE METAL CONTAMINATION FROM AN UPP...

IMMERSIVE OXIDATION AND ETCHING PROCESS FOR CLEANING SILICON ELECTR...

PLATEN AND ADAPTER ASSEMBLIES FOR FACILITATING SILICON ELECTRODE PO...

METHOD FOR INSPECTING ELECTROSTATIC CHUCKS WITH KELVIN PROBE ANALYSIS

PROCESSES FOR RECONDITIONING MULTI-COMPONENT ELECTRODES

PERIPHERALLY ENGAGING ELECTRODE CARRIERS AND ASSEMBLIES INCORPORATI...

BACKSIDE MOUNTED ELECTRODE CARRIERS AND ASSEMBLIES INCORPORATING TH...

ELECTRODE TRANSPORTER AND FIXTURE SETS INCORPORATING THE SAME

Methodology for cleaning of surface metal contamination from electr...

Cleaning of bonded silicon electrodes