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Armin Bich
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Aalen, DE
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Patents Grants
last 30 patents
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Patent Grant
Method of measuring a shape of an optical surface based on computat...
Patent number
8,593,642
Issue date
Nov 26, 2013
Carl Zeiss SMT GmbH
Rolf Freimann
G01 - MEASURING TESTING
Information
Patent Grant
Device and method for measuring lithography masks
Patent number
8,253,947
Issue date
Aug 28, 2012
Carl Zeiss SMS GmbH
Albrecht Hof
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
METHOD OF MEASURING A SHAPE OF AN OPTICAL SURFACE BASED ON COMPUTAT...
Publication number
20140078513
Publication date
Mar 20, 2014
Carl Zeiss SMT GMBH
Rolf FREIMANN
G02 - OPTICS
Information
Patent Application
SUBSTRATE HOLDER
Publication number
20130083308
Publication date
Apr 4, 2013
Carl Zeiss SMT GMBH
Ulrich Mueller
G02 - OPTICS
Information
Patent Application
METHOD OF MEASURING A SHAPE OF AN OPTICAL SURFACE AND INTERFEROMETR...
Publication number
20120229814
Publication date
Sep 13, 2012
Carl Zeiss SMT GMBH
Rolf FREIMANN
G02 - OPTICS
Information
Patent Application
DEVICE AND METHOD FOR MEASURING LITHOGRAPHY MASKS
Publication number
20110205549
Publication date
Aug 25, 2011
Carl Zeiss SMS GmbH
Albrecht Hof
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY