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Armin Heinz Hayn
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Essex, GB
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last 30 patents
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Patent Grant
Particle beam device with deflection system
Patent number
8,405,045
Issue date
Mar 26, 2013
Carl Zeiss NTS GmbH
Dirk Preikszas
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
PARTICLE BEAM DEVICE WITH DEFLECTION SYSTEM
Publication number
20120138814
Publication date
Jun 7, 2012
CARL ZEISS NTS LTD.
Dirk Preikszas
H01 - BASIC ELECTRIC ELEMENTS