Armin Liebchen

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Hayward, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Method of performing resist process calibration/optimization and DO...
- Patent number 7,652,758
- Issue date Jan 26, 2010
- ASML Masktools B.V.
- Sangbong Park
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method, program product and apparatus of simultaneous optimization...
- Patent number 7,355,673
- Issue date Apr 8, 2008
- ASML Masktools B.V.
- Duan-Fu Stephen Hsu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of performing resist process calibration/optimization and DO...
- Patent number 7,116,411
- Issue date Oct 3, 2006
- ASML Masktools B.V.
- Sangbong Park
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for providing lens aberration compensation by...
- Patent number 7,034,919
- Issue date Apr 25, 2006
- ASML Masktools B.V.
- Armin Liebchen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for fast aerial image simulation
- Patent number 6,738,859
- Issue date May 18, 2004
- ASML Masktools B.V.
- Armin Liebchen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
Method of performing resist process calibration/optimization and DO...
- Publication number 20070002311
- Publication date Jan 4, 2007
- ASML MASKTOOLS B.V.
- SangBong Park
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method of performing resist process calibration/optimization and DO...
- Publication number 20060044542
- Publication date Mar 2, 2006
- Sangbong Park
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method, program product and apparatus of simultaneous optimization...
- Publication number 20050028129
- Publication date Feb 3, 2005
- Duan-Fu Stephen Hsu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method and apparatus for providing lens aberration compensation by...
- Publication number 20040184030
- Publication date Sep 23, 2004
- Armin Liebchen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method and apparatus for fast aerial image simulation
- Publication number 20020062206
- Publication date May 23, 2002
- Armin Liebchen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY