Armin Werber

Person

Gottenheim, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Facet mirror for use in a projection exposure apparatus for microli...
- Patent number 9,996,012
- Issue date Jun 12, 2018
- Carl Zeiss SMT GmbH
- Udo Dinger
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Microlithographic projection exposure apparatus
- Patent number 9,535,336
- Issue date Jan 3, 2017
- Carl Zeiss SMT GmbH
- Sascha Bleidistel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illumination system of a microlithographic projection exposure appa...
- Patent number 9,523,922
- Issue date Dec 20, 2016
- Carl Zeiss SMT GmbH
- Florian Bach
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection exposure apparatus for microlithography for the producti...
- Patent number 9,513,562
- Issue date Dec 6, 2016
- Carl Zeiss SMT GmbH
- Juergen Fischer
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Facet mirror for use in a projection exposure apparatus for microli...
- Patent number 9,411,241
- Issue date Aug 9, 2016
- Carl Zeiss SMT GmbH
- Udo Dinger
- G02 - OPTICS
Information Patent Grant
Light modulator and illumination system of a microlithographic proj...
- Patent number 9,274,434
- Issue date Mar 1, 2016
- Carl Zeiss SMT GmbH
- Armin Werber
- G02 - OPTICS
Information Patent Grant
Actuator including magnet for a projection exposure system and proj...
- Patent number 9,025,128
- Issue date May 5, 2015
- Carl Zeiss SMT GmbH
- Armin Werber
- G02 - OPTICS
Information Patent Grant
Individual mirror for constructing a faceted mirror, in particular...
- Patent number 9,013,676
- Issue date Apr 21, 2015
- Carl Zeiss SMT GmbH
- Armin Werber
- G02 - OPTICS
Information Patent Grant
Projection exposure apparatus for microlithography for the producti...
- Patent number 8,885,143
- Issue date Nov 11, 2014
- Carl Zeiss SMT GmbH
- Juergen Fischer
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illumination system of a microlithographic projection exposure appa...
- Patent number 8,797,507
- Issue date Aug 5, 2014
- Carl Zeiss SMT GmbH
- Florian Bach
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Microlithographic projection exposure apparatus
- Patent number 8,767,176
- Issue date Jul 1, 2014
- Carl Zeiss SMT GmbH
- Sascha Bleidistel
- G02 - OPTICS
Information Patent Grant
Mirror for guiding a radiation bundle
- Patent number 8,717,531
- Issue date May 6, 2014
- Carl Zeiss SMT GmbH
- Severin Waldis
- G02 - OPTICS

Patents Applicationslast 30 patents

Information Patent Application
FACET MIRROR FOR USE IN A PROJECTION EXPOSURE APPARATUS FOR MICROLI...
- Publication number 20160313646
- Publication date Oct 27, 2016
- Carl Zeiss SMT GMBH
- Udo Dinger
- G02 - OPTICS
Information Patent Application
PROJECTION EXPOSURE APPARATUS FOR MICROLITHOGRAPHY FOR THE PRODUCTI...
- Publication number 20150015864
- Publication date Jan 15, 2015
- Carl Zeiss SMT GMBH
- Juergen Fischer
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS
- Publication number 20140333912
- Publication date Nov 13, 2014
- Carl Zeiss SMT GMBH
- Sascha Bleidistel
- G02 - OPTICS
Information Patent Application
ILLUMINATION SYSTEM OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPA...
- Publication number 20140307239
- Publication date Oct 16, 2014
- Florian Bach
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LIGHT MODULATOR AND ILLUMINATION SYSTEM OF A MICROLITHOGRAPHIC PROJ...
- Publication number 20140218708
- Publication date Aug 7, 2014
- Armin Werber
- G02 - OPTICS
Information Patent Application
ACTUATOR INCLUDING MAGNET FOR A PROJECTION EXPOSURE SYSTEM AND PROJ...
- Publication number 20120008121
- Publication date Jan 12, 2012
- Carl Zeiss SMT GMBH
- Armin Werber
- G02 - OPTICS
Information Patent Application
INDIVIDUAL MIRROR FOR CONSTRUCTING A FACETED MIRROR, IN PARTICULAR...
- Publication number 20110273694
- Publication date Nov 10, 2011
- Carl Zeiss SMT GMBH
- Armin Werber
- G02 - OPTICS
Information Patent Application
PROJECTION EXPOSURE APPARATUS FOR MICROLITHOGRAPHY FOR THE PRODUCTI...
- Publication number 20110235012
- Publication date Sep 29, 2011
- Carl Zeiss SMT GMBH
- Juergen Fischer
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS
- Publication number 20110181852
- Publication date Jul 28, 2011
- Carl Zeiss SMT GMBH
- Sascha Bleidistel
- G02 - OPTICS
Information Patent Application
ILLUMINATION SYSTEM OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPA...
- Publication number 20110181850
- Publication date Jul 28, 2011
- Carl Zeiss SMT GMBH
- Florian Bach
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
FACET MIRROR FOR USE IN A PROJECTION EXPOSURE APPARATUS FOR MICROLI...
- Publication number 20110001947
- Publication date Jan 6, 2011
- Carl Zeiss SMT AG
- Udo Dinger
- G02 - OPTICS
Information Patent Application
MIRROR FOR GUIDING A RADIATION BUNDLE
- Publication number 20100261120
- Publication date Oct 14, 2010
- Carl Zeiss SMT AG
- Severin Waldis
- G02 - OPTICS

Armin Werber

Person

Patents Grantslast 30 patents

Facet mirror for use in a projection exposure apparatus for microli...

Microlithographic projection exposure apparatus

Illumination system of a microlithographic projection exposure appa...

Projection exposure apparatus for microlithography for the producti...

Facet mirror for use in a projection exposure apparatus for microli...

Light modulator and illumination system of a microlithographic proj...

Actuator including magnet for a projection exposure system and proj...

Individual mirror for constructing a faceted mirror, in particular...

Projection exposure apparatus for microlithography for the producti...

Illumination system of a microlithographic projection exposure appa...

Microlithographic projection exposure apparatus

Mirror for guiding a radiation bundle

Patents Applicationslast 30 patents

FACET MIRROR FOR USE IN A PROJECTION EXPOSURE APPARATUS FOR MICROLI...

PROJECTION EXPOSURE APPARATUS FOR MICROLITHOGRAPHY FOR THE PRODUCTI...

MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS

ILLUMINATION SYSTEM OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPA...

LIGHT MODULATOR AND ILLUMINATION SYSTEM OF A MICROLITHOGRAPHIC PROJ...

ACTUATOR INCLUDING MAGNET FOR A PROJECTION EXPOSURE SYSTEM AND PROJ...

INDIVIDUAL MIRROR FOR CONSTRUCTING A FACETED MIRROR, IN PARTICULAR...

PROJECTION EXPOSURE APPARATUS FOR MICROLITHOGRAPHY FOR THE PRODUCTI...

MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS

ILLUMINATION SYSTEM OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPA...

FACET MIRROR FOR USE IN A PROJECTION EXPOSURE APPARATUS FOR MICROLI...

MIRROR FOR GUIDING A RADIATION BUNDLE