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Arnaud HUBAUX
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Erpent, BE
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Patents Grants
last 30 patents
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Patent Grant
Method for decision making in a semiconductor manufacturing process
Patent number
11,687,007
Issue date
Jun 27, 2023
ASML Netherlands B.V.
Arnaud Hubaux
G06 - COMPUTING CALCULATING COUNTING
Patents Applications
last 30 patents
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Patent Application
DETERMINING LITHOGRAPHIC MATCHING PERFORMANCE
Publication number
20230341783
Publication date
Oct 26, 2023
ASML NETHERLANDS B.V.
Arnaud HUBAUX
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD FOR DECISION MAKING IN A SEMICONDUCTOR MANUFACTURING PROCESS
Publication number
20230333482
Publication date
Oct 19, 2023
ASML NETHERLANDS B.V.
Arnaud HUBAUX
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
METHOD AND APPARATUS FOR PREDICTING A PROCESS METRIC ASSOCIATED WIT...
Publication number
20230124106
Publication date
Apr 20, 2023
Arnaud HUBAUX
G05 - CONTROLLING REGULATING
Information
Patent Application
METHOD FOR DECISION MAKING IN A SEMICONDUCTOR MANUFACTURING PROCESS
Publication number
20220082949
Publication date
Mar 17, 2022
ASML NETHERLANDS B.V.
Arnaud HUBAUX
G05 - CONTROLLING REGULATING