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Arndt Zeuner
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Alzenau, DE
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Patent Application
METHOD AND DEVICE FOR PLASMA TREATMENT OF A FLAT SUBSTRATE
Publication number
20120097641
Publication date
Apr 26, 2012
FRAUNHOFER GESELLSCHAFT ZUR FORDERUNG DER ANGWANDTEN FORSCHUNG E.V.
Rudolf Beckmann
H01 - BASIC ELECTRIC ELEMENTS