Arne Benson

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Shakopee, MN, US

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Patents Grantslast 30 patents

Information Patent Grant
System and method for carrying out liquid and subsequent drying tre...
- Patent number 7,556,697
- Issue date Jul 7, 2009
- FSI International, Inc.
- Arne C. Benson
- B08 - CLEANING
Information Patent Grant
Rotary unions, fluid delivery systems, and related methods
- Patent number 7,422,031
- Issue date Sep 9, 2008
- FSI International, Inc.
- Arne C. Benson
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
High flow high control valve and assembly
- Patent number 6,807,984
- Issue date Oct 26, 2004
- FSI International, Inc.
- Michael Volovets
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...

Patents Applicationslast 30 patents

Information Patent Application
SYSTEM FOR SUPPLYING WATER VAPOR IN SEMICONDUCTOR WAFER TREATMENT
- Publication number 20100124410
- Publication date May 20, 2010
- FSI International, Inc.
- Arne Benson
- B08 - CLEANING
Information Patent Application
System and method for carrying out liquid and subsequent drying tre...
- Publication number 20070042110
- Publication date Feb 22, 2007
- Arne C. Benson
- B08 - CLEANING
Information Patent Application
System and method for carrying out liquid and subsequent drying tre...
- Publication number 20050276909
- Publication date Dec 15, 2005
- Arne C. Benson
- B08 - CLEANING
Information Patent Application
Rotary unions, fluid delivery systems, and related methods
- Publication number 20050200123
- Publication date Sep 15, 2005
- FSI International, Inc.
- Arne C. Benson
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
High flow high control valve and assembly
- Publication number 20030116204
- Publication date Jun 26, 2003
- FSI International, Inc.
- Michael Volovets
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...