Arne Schob

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Jena, DE

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Patents Grantslast 30 patents

Information Patent Grant
Projection objective of a microlithographic projection exposure app...
- Patent number 9,372,411
- Issue date Jun 21, 2016
- Carl Zeiss SMT GmbH
- Johannes Zellner
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
PROJECTION OBJECTIVE OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APP...
- Publication number 20140185024
- Publication date Jul 3, 2014
- Johannes Zellner
- H01 - BASIC ELECTRIC ELEMENTS