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Arne Seyfarth
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Jena, DE
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Patents Grants
last 30 patents
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Patent Grant
Method for emulation of a photolithographic process and mask inspec...
Patent number
8,913,120
Issue date
Dec 16, 2014
Carl Zeiss SMS GmbH
Eric Poortinga
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
METHOD FOR EMULATION OF A PHOTOLITHOGRAPHIC PROCESS AND MASK INSPEC...
Publication number
20110090329
Publication date
Apr 21, 2011
Carl Zeiss SMS GmbH
Eric Poortinga
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY