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Tuebingen, DE
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Patents Grants
last 30 patents
Information
Patent Grant
MEMS microphone system
Patent number
11,012,789
Issue date
May 18, 2021
Akustica, Inc.
Christoph Hermes
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for producing thin MEMS wafers
Patent number
10,793,430
Issue date
Oct 6, 2020
Robert Bosch GmbH
Sebastien Loiseau
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Capacitive MEMS-sensor element having bond pads for the electrical...
Patent number
9,725,300
Issue date
Aug 8, 2017
Robert Bosch GmbH
Heiko Stahl
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Eutectic bonding of thin chips on a carrier substrate
Patent number
9,266,721
Issue date
Feb 23, 2016
Robert Bosch GmbH
Andreas Pruemm
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for constructing an electrical circuit, and electrical circuit
Patent number
8,993,356
Issue date
Mar 31, 2015
Robert Bosch GmbH
Tjalf Pirk
Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information
Patent Grant
Sensor and method for its production
Patent number
8,749,013
Issue date
Jun 10, 2014
Robert Bosch GmbH
Hubert Benzel
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Semiconductor component having a micromechanical microphone structure
Patent number
8,698,255
Issue date
Apr 15, 2014
Robert Bosch GmbH
Frank Reichenbach
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for creating a micromechanical membrane structure and MEMS c...
Patent number
8,691,611
Issue date
Apr 8, 2014
Robert Bosch GmbH
Arnim Hoechst
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Micromechanical component having a rear volume
Patent number
8,692,339
Issue date
Apr 8, 2014
Robert Bosch GmbH
Jochen Reinmuth
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Manufacturing method for a micromechanical component and micromecha...
Patent number
8,621,929
Issue date
Jan 7, 2014
Robert Bosch GmbH
Stefan Weiss
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for manufacturing a micromechanical component, and micromech...
Patent number
8,481,427
Issue date
Jul 9, 2013
Robert Bosch GmbH
Hans Artmann
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Micromechanical component and method for the manufacture thereof
Patent number
8,217,476
Issue date
Jul 10, 2012
Robert Bosch GmbH
Karl-Heinz Kraft
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Acoustic sensor element
Patent number
8,089,828
Issue date
Jan 3, 2012
Robert Bosch GmbH
Frank Fischer
H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information
Patent Grant
Micromechanical component having a diaphragm
Patent number
7,495,302
Issue date
Feb 24, 2009
Robert Bosch GmbH
Frank Fischer
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Micromechanical sensor
Patent number
7,435,991
Issue date
Oct 14, 2008
Robert Bosch GmbH
Hans-Peter Baer
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Micromechanical component having a sealed cavity and at least two d...
Patent number
7,243,551
Issue date
Jul 17, 2007
Robert Bosch GmbH
Frank Fischer
B81 - MICRO-STRUCTURAL TECHNOLOGY
Patents Applications
last 30 patents
Information
Patent Application
MEMS Microphone System
Publication number
20190098418
Publication date
Mar 28, 2019
ROBERT BOSCH GmbH
Christoph Hermes
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD FOR PRODUCING THIN MEMS WAFERS
Publication number
20190092631
Publication date
Mar 28, 2019
ROBERT BOSCH GmbH
Sebastien Loiseau
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
CAPACITIVE MEMS-SENSOR ELEMENT HAVING BOND PADS FOR THE ELECTRICAL...
Publication number
20160280534
Publication date
Sep 29, 2016
ROBERT BOSCH GmbH
Heiko Stahl
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
EUTECTIC BONDING OF THIN CHIPS ON A CARRIER SUBSTRATE
Publication number
20130241012
Publication date
Sep 19, 2013
ROBERT BOSCH GmbH
Andreas Pruemm
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD FOR CREATING A MICROMECHANICAL MEMBRANE STRUCTURE AND MEMS C...
Publication number
20120126346
Publication date
May 24, 2012
Arnim Hoechst
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SEMICONDUCTOR COMPONENT HAVING A MICROMECHANICAL MICROPHONE STRUCTURE
Publication number
20120091545
Publication date
Apr 19, 2012
Frank Reichenbach
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Method for Constructing an Electrical Circuit, and Electrical Circuit
Publication number
20120061860
Publication date
Mar 15, 2012
ROBERT BOSCH GmbH
Tjalf Pirk
Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information
Patent Application
Method for Producing an Electrical Circuit and Electrical Circuit
Publication number
20120038065
Publication date
Feb 16, 2012
ROBERT BOSCH GmbH
Juergen Butz
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICROMECHANICAL COMPONENT HAVING A REAR VOLUME
Publication number
20110198713
Publication date
Aug 18, 2011
Jochen Reinmuth
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Manufacturing method for a micromechanical component and micromecha...
Publication number
20110079081
Publication date
Apr 7, 2011
Stefan WEISS
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SENSOR AND METHOD FOR PRODUCING THE SAME
Publication number
20110002359
Publication date
Jan 6, 2011
Hubert Benzel
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICROMECHANICAL COMPONENT AND METHOD FOR THE MANUFACTURE THEREOF
Publication number
20110001200
Publication date
Jan 6, 2011
Karl-Heinz Kraft
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Method for Manufacturing a Micromechanical Component, and Micromec...
Publication number
20100260974
Publication date
Oct 14, 2010
Hans Artmann
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ACOUSTIC SENSOR ELEMENT
Publication number
20100135123
Publication date
Jun 3, 2010
Frank Fischer
H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information
Patent Application
Micromechanical component having a diaphragm, and method for manufa...
Publication number
20050204821
Publication date
Sep 22, 2005
Frank Fischer
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Micromechanical component and corresponding method for its manufacture
Publication number
20050193827
Publication date
Sep 8, 2005
Frank Fischer
B81 - MICRO-STRUCTURAL TECHNOLOGY