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Arno J. Bleeker
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Delft, NL
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last 30 patents
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Patent Grant
Method and apparatus for angular-resolved spectroscopic lithography...
Patent number
11,525,786
Issue date
Dec 13, 2022
ASML Netherlands B.V.
Arie Jeffrey Den Boef
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method and apparatus for angular-resolved spectroscopic lithography...
Patent number
10,955,353
Issue date
Mar 23, 2021
ASML Netherlands B.V.
Arie Jeffrey Den Boef
G01 - MEASURING TESTING
Information
Patent Grant
Method and apparatus for angular-resolved spectroscopic lithography...
Patent number
10,241,055
Issue date
Mar 26, 2019
ASML Netherlands B.V.
Arie Jeffrey Maria Den Boef
G01 - MEASURING TESTING
Information
Patent Grant
Radiation source
Patent number
10,222,702
Issue date
Mar 5, 2019
ASML Netherlands B.V.
Arno Jan Bleeker
G02 - OPTICS
Information
Patent Grant
Metrology method and inspection apparatus, lithographic system and...
Patent number
9,946,167
Issue date
Apr 17, 2018
ASML Netherlands B.V.
Hendrik Jan Hidde Smilde
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Radiation modulator for a lithography apparatus, a lithography appa...
Patent number
9,823,576
Issue date
Nov 21, 2017
ASML Netherlands B.V.
Dries Smeets
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Device, lithographic apparatus, method for guiding radiation and de...
Patent number
9,715,183
Issue date
Jul 25, 2017
ASML Netherlands B.V.
Wouter Dick Koek
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus, device manufacturing method and computer pr...
Patent number
9,696,636
Issue date
Jul 4, 2017
ASML Netherlands B.V.
Patricius Aloysius Jacobus Tinnemans
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
9,690,210
Issue date
Jun 27, 2017
ASML Netherlands B.V.
Arno Jan Bleeker
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithography apparatus, a device manufacturing method, a method of m...
Patent number
9,594,304
Issue date
Mar 14, 2017
ASML Netherlands B.V.
Martinus Hendricus Henricus Hoeks
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
9,568,831
Issue date
Feb 14, 2017
Patricius Aloysius Jacobus Tinnemans
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus, method for maintaining a lithographic appar...
Patent number
9,513,561
Issue date
Dec 6, 2016
ASML Netherlands B.V.
Arno Jan Bleeker
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
9,494,869
Issue date
Nov 15, 2016
ASML Netherlands B.V.
Hans Butler
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
9,341,960
Issue date
May 17, 2016
ASML Netherlands B.V.
Antonius Johannes Josephus Van Dijsseldonk
G02 - OPTICS
Information
Patent Grant
Inspection apparatus and method
Patent number
9,304,077
Issue date
Apr 5, 2016
ASML Netherlands B.V.
Lucas Henricus Johannes Stevens
G01 - MEASURING TESTING
Information
Patent Grant
Lithographic apparatus and device manufacturing method using dose c...
Patent number
9,176,392
Issue date
Nov 3, 2015
ASML Netherlands B.V.
Kars Zeger Troost
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Metrology method and inspection apparatus, lithographic system and...
Patent number
9,140,998
Issue date
Sep 22, 2015
ASML Netherlands B.V.
Hendrik Jan Hidde Smilde
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus, substrate table, and method for enhancing s...
Patent number
8,792,085
Issue date
Jul 29, 2014
ASML Netherlands B.V.
Michiel Puyt
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method and apparatus for angular-resolved spectroscopic lithography...
Patent number
8,760,662
Issue date
Jun 24, 2014
ASML Netherlands B.V.
Arie Jeffrey Den Boef
G01 - MEASURING TESTING
Information
Patent Grant
Method and apparatus for angular-resolved spectroscopic lithography...
Patent number
8,553,230
Issue date
Oct 8, 2013
ASML Netherlands B.V.
Arie Jeffrey Maria Den Boef
G01 - MEASURING TESTING
Information
Patent Grant
Metrology method and apparatus, lithographic apparatus, device manu...
Patent number
8,411,287
Issue date
Apr 2, 2013
ASML Netherlands B.V.
Hendrik Jan Hidde Smilde
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and method
Patent number
8,189,172
Issue date
May 29, 2012
ASML Netherlands B.V.
Johannes Jacobus Matheus Baselmans
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
8,159,647
Issue date
Apr 17, 2012
ASML Holding N.V.
Arno Jan Bleeker
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method and apparatus for angular-resolved spectroscopic lithography...
Patent number
8,054,467
Issue date
Nov 8, 2011
ASML Netherlands B.V.
Arie Jeffrey Maria Den Boef
G01 - MEASURING TESTING
Information
Patent Grant
Pellicle, lithographic apparatus and device manufacturing method
Patent number
8,018,578
Issue date
Sep 13, 2011
ASML Netherlands B.V.
Vadim Yevgenyevich Banine
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
7,965,380
Issue date
Jun 21, 2011
ASML Netherland B.V.
Arno Jan Bleeker
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Stage apparatus, lithographic apparatus and device manufacturing me...
Patent number
7,924,406
Issue date
Apr 12, 2011
ASML Netherlands B.V.
Erik Roelof Loopstra
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
7,911,586
Issue date
Mar 22, 2011
ASML Netherlands B.V.
Cheng-Qun Gui
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
7,894,037
Issue date
Feb 22, 2011
ASML Netherlands B.V.
Arno Jan Bleeker
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Limiting a portion of a patterning device used to pattern a beam
Patent number
7,894,041
Issue date
Feb 22, 2011
ASML Netherlands B.V.
Arno Jan Bleeker
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
Method and Apparatus for Angular-Resolved Spectroscopic Lithography...
Publication number
20190170657
Publication date
Jun 6, 2019
ASML NETHERLANDS B.V.
Arie Jeffrey Maria DEN BOEF
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Radiation Source
Publication number
20180031979
Publication date
Feb 1, 2018
ASML NETHERLANDS B.V.
Arno Jan BLEEKER
G02 - OPTICS
Information
Patent Application
ROTATABLE FRAME, LITHOGRAPHIC APPARATUS, PROJECTION SYSTEM, METHOD...
Publication number
20160349628
Publication date
Dec 1, 2016
ASML NETHERLANDS B.V.
Arno Jan BLEEKER
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Metrology Method and Inspection Apparatus, Lithographic System and...
Publication number
20160033877
Publication date
Feb 4, 2016
ASML NETHERLANDS B.V.
Hendrik Jan Hidde SMILDE
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Lithography Apparatus, a Device Manufacturing Method, a Method Of M...
Publication number
20150062547
Publication date
Mar 5, 2015
ASML NETHERLANDS B.V.
Martinus Hendricus Henricus Hoeks
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Rotatable Frame For a Lithographic Apparatus
Publication number
20150034788
Publication date
Feb 5, 2015
ASML NETHERLANDS B.V.
Arno Jan Bleeker
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20140354970
Publication date
Dec 4, 2014
ASML NETHERLANDS B.V.
Patricius Aloysius Jacobus Tinnemans
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
DEVICE, LITHOGRAPHIC APPARATUS, METHOD FOR GUIDING RADIATION AND DE...
Publication number
20140347641
Publication date
Nov 27, 2014
ASML NETHERLANDS B.V.
Wouter Dick Koek
G02 - OPTICS
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20140340666
Publication date
Nov 20, 2014
ASML NETHERLANDS B.V.
Hans Butler
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS, DEVICE MANUFACTURING METHOD AND COMPUTER PR...
Publication number
20140285785
Publication date
Sep 25, 2014
ASML NETHERLANDS B.V.
Patricius Aloysius Jacobus Tinnemans
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20140285782
Publication date
Sep 25, 2014
ASML NETHERLANDS B.V.
Antonius Johannes Josephus Van Dijsseldonk
G02 - OPTICS
Information
Patent Application
Method and Apparatus for Angular-Resolved Spectroscopic Lithography...
Publication number
20140233025
Publication date
Aug 21, 2014
ASML NETHERLANDS B.V.
Arie Jeffrey Maria DEN BOEF
G01 - MEASURING TESTING
Information
Patent Application
RADIATION MODULATOR FOR A LITHOGRAPHY APPARATUS, A LITHOGRAPHY APPA...
Publication number
20140211189
Publication date
Jul 31, 2014
ASML NETHERLANDS B.V.
Dries SMEETS
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic Apparatus and Device Manufacturing Method Using Dose C...
Publication number
20140176929
Publication date
Jun 26, 2014
ASML NETHERLANDS B.V.
Kars Zeger Troost
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS, PROGRAMMABLE PATTERNING DEVICE AND LITHOGRA...
Publication number
20140160452
Publication date
Jun 12, 2014
ASML NETHERLANDS B.V.
Pieter Willem Herman De Jager
B41 - PRINTING LINING MACHINES TYPEWRITERS STAMPS
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20140152969
Publication date
Jun 5, 2014
ASML, Netherland B.V.
Arno Jan Bleeker
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method and Apparatus for Angular-Resolved Spectroscopic Lithography...
Publication number
20140055788
Publication date
Feb 27, 2014
ASML NETHERLANDS B.V.
Arie Jeffrey Maria DEN BOEF
G01 - MEASURING TESTING
Information
Patent Application
LITHOGRAPHIC APPARATUS, METHOD FOR MAINTAINING A LITHOGRAPHIC APPAR...
Publication number
20140009746
Publication date
Jan 9, 2014
ASML NETHERLANDS B.V.
Arno Jan Bleeker
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Inspection Method and Apparatus, and Lithographic Apparatus
Publication number
20130162996
Publication date
Jun 27, 2013
ASML NETHERLANDS B.V.
Alexander STRAAIJER
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Metrology Method and Inspection Apparatus, Lithographic System and...
Publication number
20120123581
Publication date
May 17, 2012
ASML NETHERLANDS B.V.
Hendrik Jan Hidde SMILDE
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Inspection Apparatus and Method
Publication number
20120038910
Publication date
Feb 16, 2012
ASML NETHERLANDS B.V.
Lucas Henricus Johannes STEVENS
G01 - MEASURING TESTING
Information
Patent Application
Method and Apparatus for Angular-Resolved Spectroscopic Lithography...
Publication number
20120038929
Publication date
Feb 16, 2012
ASML NETHERLANDS B.V.
Arie Jeffrey Maria Den Boef
G01 - MEASURING TESTING
Information
Patent Application
Metrology Method and Apparatus, Lithographic Apparatus, Device Manu...
Publication number
20110043791
Publication date
Feb 24, 2011
ASML NETHERLANDS B.V.
Hendrik Jan Hidde Smilde
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
TARGET MATERIAL, A SOURCE, AN EUV LITHOGRAPHIC APPARATUS AND A DEVI...
Publication number
20110043777
Publication date
Feb 24, 2011
ASML NETHERLANDS B.V.
Vladimir Mihailovitc Krivtsun
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
EXTREME ULTRAVIOLET MICROSCOPE
Publication number
20110013274
Publication date
Jan 20, 2011
ASML NETHERLANDS B.V.
Vadim Yevgenvich Banine
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Application
Method and apparatus for angular-resolved spectroscopic lithography...
Publication number
20110007314
Publication date
Jan 13, 2011
ASML NETHERLANDS B.V.
Arie Jeffrey Maria Den Boef
G01 - MEASURING TESTING
Information
Patent Application
Lithographic Apparatus, Substrate Table, and Method for Enhancing S...
Publication number
20100296073
Publication date
Nov 25, 2010
ASML NETHERLANDS B.V.
Michiel PUYT
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic Apparatus and Device Manufacturing Method
Publication number
20090213353
Publication date
Aug 27, 2009
ASML NETHERLANDS B.V.
Cheng-Qun Gui
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus and device manufacturing method
Publication number
20090040492
Publication date
Feb 12, 2009
ASML NETHERLANDS B.V.
Vladimir Vitalevich Ivanov
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Methods and Systems to Compensate for a Stitching Disturbance of a...
Publication number
20090033893
Publication date
Feb 5, 2009
ASML Holding N.V.
Arno Bleeker
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY