Arno Schmittner

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Koenigsbronn, DE

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Patents Grantslast 30 patents

Information Patent Grant
Method for repairing reflective optical elements for EUV lithography
- Patent number 11,099,484
- Issue date Aug 24, 2021
- Carl Zeiss SMT GmbH
- Robert Meier
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Optical element, in particular for a microlithographic projection e...
- Patent number 10,578,974
- Issue date Mar 3, 2020
- Carl Zeiss SMT GmbH
- Ralf Moser
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Cooler for use in a device in a vacuum
- Patent number 10,303,067
- Issue date May 28, 2019
- Carl Zeiss SMT GmbH
- Willi Anderl
- F28 - HEAT EXCHANGE IN GENERAL

Patents Applicationslast 30 patents

Information Patent Application
FIELD FACET SYSTEM AND LITHOGRAPHY APPARATUS
- Publication number 20230384685
- Publication date Nov 30, 2023
- Carl Zeiss SMT GMBH
- Arno Schmittner
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
FIELD FACET SYSTEM AND LITHOGRAPHY APPARATUS
- Publication number 20230384686
- Publication date Nov 30, 2023
- Carl Zeiss SMT GMBH
- Arno Schmittner
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
OPTICAL ELEMENT, IN PARTICULAR FOR A MICROLITHOGRAPHIC PROJECTION E...
- Publication number 20190302624
- Publication date Oct 3, 2019
- Carl Zeiss SMT GMBH
- Ralf Moser
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD FOR REPAIRING REFLECTIVE OTPICAL ELEMENTS FOR EUV LITHOGRAPHY
- Publication number 20190302628
- Publication date Oct 3, 2019
- Carl Zeiss SMT GMBH
- Robert MEIER
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
COOLER FOR USE IN A DEVICE IN A VACUUM
- Publication number 20160299443
- Publication date Oct 13, 2016
- Carl Zeiss SMT GMBH
- Willi Anderl
- F28 - HEAT EXCHANGE IN GENERAL
Information Patent Application
COOLER FOR PLASMA GENERATION CHAMBER OF EUV RADIATION SOURCE
- Publication number 20150083938
- Publication date Mar 26, 2015
- CARL ZEISS LASER OPTICS GmbH
- Willi Anderl
- G02 - OPTICS