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Arnold Storm
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Delft, NL
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Patents Grants
last 30 patents
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Patent Grant
Method for removing a contamination layer from an optical surface a...
Patent number
8,980,009
Issue date
Mar 17, 2015
Carl Zeiss SMT GmbH
Dirk Heinrich Ehm
B08 - CLEANING
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Patent Grant
Method for removing a contamination layer from an optical surface a...
Patent number
8,419,862
Issue date
Apr 16, 2013
Carl Zeiss SMT GmbH
Dirk Heinrich Ehm
B08 - CLEANING
Patents Applications
last 30 patents
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Patent Application
METHOD FOR REMOVING A CONTAMINATION LAYER FROM AN OPTICAL SURFACE A...
Publication number
20130186430
Publication date
Jul 25, 2013
ASML NETHERLANDS B.V.
Dirk Heinrich Ehm
B08 - CLEANING
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Patent Application
Method for removing a contamination layer from an optical surface a...
Publication number
20100288302
Publication date
Nov 18, 2010
Dirk Heinrich Ehm
B08 - CLEANING