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Arthur Erland Swaving
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Waalre, NL
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last 30 patents
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Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
9,606,457
Issue date
Mar 28, 2017
ASML Netherlands B.V.
Norbertus Josephus Martinus Van Den Nieuwelaar
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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last 30 patents
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Patent Application
Lithographic Apparatus and Device Manufacturing Method
Publication number
20130215408
Publication date
Aug 22, 2013
ASML NETHERLANDS B.V.
Norbertus Josephus Martinus VAN DEN NIEUWELAAR
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY