Arthur K. Yasuda

Follow

Person

San Francisco, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Method of in situ cleaning a vacuum plasma processing chamber
- Patent number 5,679,215
- Issue date Oct 21, 1997
- Lam Research Corporation
- Michael S. Barnes
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Reaction chamber design to minimize particle generation in chemical...
- Patent number 5,368,646
- Issue date Nov 29, 1994
- Lam Research Corporation
- Arthur K. Yasuda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Reaction chamber design and method to minimize particle generation...
- Patent number 5,200,232
- Issue date Apr 6, 1993
- Lam Research Corporation
- James E. Tappan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...