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Arthur Laflamme, JR.
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Rowley, MA, US
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Patents Grants
last 30 patents
Information
Patent Grant
High throughput thermal treatment system and method of operating
Patent number
8,303,715
Issue date
Nov 6, 2012
Tokyo Electron Limited
Thomas Hamelin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Processing system and method for chemically treating a substrate
Patent number
7,964,058
Issue date
Jun 21, 2011
Tokyo Electron Limited
Thomas Hamelin
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Reduced contaminant gas injection system and method of using
Patent number
7,743,731
Issue date
Jun 29, 2010
Tokyo Electron Limited
Takashi Enomoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Processing system and method for treating a substrate
Patent number
7,651,583
Issue date
Jan 26, 2010
Tokyo Electron Limited
Martin Kent
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Processing system and method for treating a substrate
Patent number
7,462,564
Issue date
Dec 9, 2008
Tokyo Electron Limited
Thomas Hamelin
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method and apparatus for improved baffle plate
Patent number
7,461,614
Issue date
Dec 9, 2008
Tokyo Electron Limited
Steven T Fink
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Chemical processing system and method
Patent number
7,462,243
Issue date
Dec 9, 2008
Tokyo Electron Limited
Arthur H Laflamme, Jr.
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Processing system and method for thermally treating a substrate
Patent number
7,079,760
Issue date
Jul 18, 2006
Tokyo Electron Limited
Thomas Hamelin
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Processing system and method for treating a substrate
Patent number
7,029,536
Issue date
Apr 18, 2006
Tokyo Electron Limited
Thomas Hamelin
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Processing system and method for chemically treating a substrate
Patent number
6,951,821
Issue date
Oct 4, 2005
Tokyo Electron Limited
Thomas Hamelin
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
PROCESSING SYSTEM AND METHOD FOR CHEMICALLY TREATING A SUBSTRATE
Publication number
20110204029
Publication date
Aug 25, 2011
TOKYO ELECTRON LIMITED
Thomas Hamelin
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
HIGH THROUGHPUT THERMAL TREATMENT SYSTEM AND METHOD OF OPERATING
Publication number
20100025368
Publication date
Feb 4, 2010
TOKYO ELECTRON LIMITED
Thomas Hamelin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Reduced Maintenance Chemical Oxide Removal (COR) Processing System
Publication number
20090226633
Publication date
Sep 10, 2009
TOKYO ELECTRON LIMITED
Arthur H. LaFlamme, JR.
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR