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Rotary flex union
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Patent number 10,001,161
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Issue date Jun 19, 2018
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Varian Semiconductor Equipment Associates, Inc.
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Arthur P. Riaf
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H01 - BASIC ELECTRIC ELEMENTS
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Rotary flex union
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Patent number 9,377,048
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Issue date Jun 28, 2016
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Varian Semiconductor Equipment Associates, Inc.
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Arthur P. Riaf
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F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
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Thin wafer support assembly
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Patent number 8,963,337
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Issue date Feb 24, 2015
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Varian Semiconductor Equipment Associates
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Arthur Paul Riaf
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H01 - BASIC ELECTRIC ELEMENTS
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