Arthur Schweighofer

Follow

Person

Burghausen, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Holding device and method for treating wafer-like objects, and a me...
- Patent number 5,093,550
- Issue date Mar 3, 1992
- Wacker-Chemitronic Gesellschaft fur Elektronic-Grundstoffe mbH
- Hans A. Gerber
- H01 - BASIC ELECTRIC ELEMENTS