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Arthur Sherman

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  • Menlo Park, CA, US
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Patents Grantslast 30 patents

  • Information Patent Grant

    Sequential chemical vapor deposition
    • Patent number 8,323,737
    • Issue date Dec 4, 2012
    • ASM International N.V.
    • Arthur Sherman
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Sequential chemical vapor deposition
    • Patent number 7,682,657
    • Issue date Mar 23, 2010
    • ASM International N.V.
    • Arthur Sherman
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Sequential chemical vapor deposition
    • Patent number 7,410,671
    • Issue date Aug 12, 2008
    • ASM International N.V
    • Arthur Sherman
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Atomic layer deposition using multilayers
    • Patent number 7,399,357
    • Issue date Jul 15, 2008
    • Arthur Sherman
    • C30 - CRYSTAL GROWTH
  • Information Patent Grant

    Sequential chemical vapor deposition
    • Patent number 6,652,924
    • Issue date Nov 25, 2003
    • Licensee for Microelectronics: ASM America, Inc.
    • Arthur Sherman
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Sequential chemical vapor deposition
    • Patent number 6,616,986
    • Issue date Sep 9, 2003
    • ASM America Inc.
    • Arthur Sherman
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Sequential chemical vapor deposition
    • Patent number 6,342,277
    • Issue date Jan 29, 2002
    • Licensee for Microelectronics: ASM America, Inc.
    • Arthur Sherman
    • C30 - CRYSTAL GROWTH
  • Information Patent Grant

    Electrostatic chuck
    • Patent number 6,141,203
    • Issue date Oct 31, 2000
    • Arthur Sherman
    • H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
  • Information Patent Grant

    Sequential chemical vapor deposition
    • Patent number 5,916,365
    • Issue date Jun 29, 1999
    • Arthur Sherman
    • C30 - CRYSTAL GROWTH
  • Information Patent Grant

    Electrostatic chuck
    • Patent number 5,867,359
    • Issue date Feb 2, 1999
    • Arthur Sherman
    • H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
  • Information Patent Grant

    Electrostatic chuck
    • Patent number 5,535,090
    • Issue date Jul 9, 1996
    • Arthur Sherman
    • H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
  • Information Patent Grant

    Anti-stick electrostatic chuck for a low pressure environment
    • Patent number 5,426,558
    • Issue date Jun 20, 1995
    • Varian Associates, Inc.
    • Arthur Sherman
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Apparatus and method for high rate deposition and etching
    • Patent number 4,563,367
    • Issue date Jan 7, 1986
    • Applied Materials, Inc.
    • Arthur Sherman
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents