Arthur Winfried, Eduardus Minnaert

Person

Veldhoven, NL

People

Patents Grantslast 30 patents

Information Patent Grant
Method for positioning a target portion of a substrate with respect...
- Patent number 7,889,357
- Issue date Feb 15, 2011
- ASML Netherlands B.V.
- Cornelis Henricus Van De Vin
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for positioning a target portion of a substrate with respect...
- Patent number 7,746,484
- Issue date Jun 29, 2010
- ASML Netherlands B.V.
- Cornelis Henricus Van De Vin
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 7,359,030
- Issue date Apr 15, 2008
- ASML Netherlands B.V.
- Klaus Simon
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Lithographic apparatus and method for determining Z position errors...
- Patent number 7,333,174
- Issue date Feb 19, 2008
- ASML Netherlands, B.V.
- Willem Herman Gertruda Anna Koenen
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR POSITIONING A TARGET PORTION OF A SUBSTRATE WITH RESPECT...
- Publication number 20110109889
- Publication date May 12, 2011
- ASML NETHERLANDS B.V.
- Cornelis Henricus VAN DE VIN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD FOR POSITIONING A TARGET PORTION OF A SUBSTRATE WITH RESPECT...
- Publication number 20100245798
- Publication date Sep 30, 2010
- ASML NETHERLANDS B.V.
- Cornelis Henricus VAN DE VIN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method and Lithographic Apparatus for Acquiring Height Data Relatin...
- Publication number 20090262320
- Publication date Oct 22, 2009
- ASML NETHERLANDS B.V.
- Frank Staals
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method for positioning a target portion of a substrate with respect...
- Publication number 20080151265
- Publication date Jun 26, 2008
- ASML NETHERLANDS B.V.
- Cornelis Henricus Van De Vin
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method for positioning a target portion of a substrate with respect...
- Publication number 20080151204
- Publication date Jun 26, 2008
- ASML NETHERLANDS B.V.
- Cornelis Henricus Van De Vin
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic apparatus and method for determining Z position errors...
- Publication number 20060139595
- Publication date Jun 29, 2006
- ASML NETHERLANDS B.V.
- Willem Herman Gertruda Anna Koenen
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Substrate holder and device manufacturing method
- Publication number 20040052031
- Publication date Mar 18, 2004
- ASML NETHERLANDS B.V.
- Johannes Wilhelmus Maria Krikhaar
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Arthur Winfried, Eduardus Minnaert

Person

Patents Grantslast 30 patents

Method for positioning a target portion of a substrate with respect...

Method for positioning a target portion of a substrate with respect...

Lithographic apparatus and device manufacturing method

Lithographic apparatus and method for determining Z position errors...

Patents Applicationslast 30 patents

METHOD FOR POSITIONING A TARGET PORTION OF A SUBSTRATE WITH RESPECT...

METHOD FOR POSITIONING A TARGET PORTION OF A SUBSTRATE WITH RESPECT...

Method and Lithographic Apparatus for Acquiring Height Data Relatin...

Method for positioning a target portion of a substrate with respect...

Method for positioning a target portion of a substrate with respect...

Lithographic apparatus and method for determining Z position errors...

Substrate holder and device manufacturing method