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Arthur Winfried Eduardus Minnaert
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Veldhoven, NL
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Patents Grants
last 30 patents
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Patent Grant
Lithographic apparatus and method of manufacturing a device
Patent number
9,606,445
Issue date
Mar 28, 2017
ASML Netherlands B.V.
Vadim Yevgenyevich Banine
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Substrate holder and device manufacturing method
Patent number
6,822,730
Issue date
Nov 23, 2004
ASML Netherlands B.V.
Johannes Wilhelmus Maria Krikhaar
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Optical exposure method, device manufacturing method and lithograph...
Patent number
6,618,118
Issue date
Sep 9, 2003
ASML Netherlands B.V.
Arthur Winfried Eduardus Minnaert
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
LITHOGRAPHIC APPARATUS AND ELECTROSTATIC CLAMP DESIGNS
Publication number
20230008474
Publication date
Jan 12, 2023
ASML Holding N.V.
Victor Antonio PEREZ-FALCON
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information
Patent Application
Lithographic Apparatus and Method of Manufacturing a Device
Publication number
20150192861
Publication date
Jul 9, 2015
ASML NETHERLANDS B.V.
Vadim Yevgenyevich Banine
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus and method for determining Z position errors...
Publication number
20060170892
Publication date
Aug 3, 2006
ASML NETHERLANDS B.V.
Willem Herman Gertruda Anna Koenen
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Substrate holder and device manufacturing method
Publication number
20050041234
Publication date
Feb 24, 2005
ASML NETHERLANDS B.V.
Johannes Wilhelmus Maria Krikhaar
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus and device manufacturing method
Publication number
20040135099
Publication date
Jul 15, 2004
ASML NETHERLANDS B.V.
Klaus Simon
C40 - COMBINATORIAL CHEMISTRY
Information
Patent Application
Optical exposure method, device manufacturing method and lithograph...
Publication number
20020171818
Publication date
Nov 21, 2002
Arthur Winfried Eduardus Minnaert
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY