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Arthur Y. Chen
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Fremont, CA, US
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last 30 patents
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Patent Grant
Multiple stage process for cleaning process chambers
Patent number
6,872,322
Issue date
Mar 29, 2005
Applied Materials, Inc.
Waiching Chow
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Self-cleaning etch process
Patent number
6,699,399
Issue date
Mar 2, 2004
Applied Materials, Inc.
Xue-Yu Qian
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Treatment of etching chambers using activated cleaning gas
Patent number
6,379,575
Issue date
Apr 30, 2002
Applied Materials, Inc.
Gerald Zheyao Yin
B08 - CLEANING
Information
Patent Grant
Plasma assisted processing chamber with separate control of species...
Patent number
6,352,049
Issue date
Mar 5, 2002
Applied Materials, Inc.
Gerald Yin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Self-cleaning etch process
Patent number
6,136,211
Issue date
Oct 24, 2000
Applied Materials, Inc.
Xue-Yu Qian
H01 - BASIC ELECTRIC ELEMENTS