Arul Dhas

Person

Sherwood, OR, US

People

Patents Grantslast 30 patents

Information Patent Grant
Defect control and stability of DC bias in RF plasma-based substrat...
- Patent number 10,704,149
- Issue date Jul 7, 2020
- Lam Research Corporation
- Arul Dhas
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Defect control and stability of DC bias in RF plasma-based substrat...
- Patent number 10,047,438
- Issue date Aug 14, 2018
- Lam Research Corporation
- Arul Dhas
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Systems and methods for improving deposition rate uniformity and re...
- Patent number 9,617,637
- Issue date Apr 11, 2017
- Lam Research Corporation
- Arul Dhas
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus to minimize seam effect during TEOS oxide film...
- Patent number 9,570,289
- Issue date Feb 14, 2017
- Lam Research Corporation
- Arul N. Dhas
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for the reduction of defectivity in vapor deposited films
- Patent number 9,328,416
- Issue date May 3, 2016
- Lam Research Corporation
- Arul N. Dhas
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of eliminating small bin defects in high throughput TEOS films
- Patent number 8,034,725
- Issue date Oct 11, 2011
- Novellus Systems, Inc.
- Jon Henri
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus to reduce defects in liquid based PECVD films
- Patent number 8,017,527
- Issue date Sep 13, 2011
- Novellus Systems, Inc.
- Arul N. Dhas
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of eliminating small bin defects in high throughput TEOS films
- Patent number 7,704,894
- Issue date Apr 27, 2010
- Novellus Systems, Inc.
- Jon Henri
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
CONTINUOUS PLASMA FOR FILM DEPOSITION AND SURFACE TREATMENT
- Publication number 20210335606
- Publication date Oct 28, 2021
- LAM RESEARCH CORPORATION
- Arul N. Dhas
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DC BIAS CIRCUIT AND GAS DELIVERY SYSTEM FOR SUBSTRATE PROCESSING SY...
- Publication number 20200332418
- Publication date Oct 22, 2020
- LAM RESEARCH CORPORATION
- Arul Dhas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEFECT CONTROL AND STABILITY OF DC BIAS IN RF PLASMA-BASED SUBSTRAT...
- Publication number 20180347046
- Publication date Dec 6, 2018
- LAM RESEARCH CORPORATION
- Arul Dhas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS TO MINIMIZE SEAM EFFECT DURING TEOS OXIDE FILM...
- Publication number 20160260603
- Publication date Sep 8, 2016
- LAM RESEARCH CORPORATION
- Arul N. Dhas
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEMS AND METHODS FOR IMPROVING DEPOSITION RATE UNIFORMITY AND RE...
- Publication number 20160017493
- Publication date Jan 21, 2016
- LAM RESEARCH CORPORATION
- Arul Dhas
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEFECT CONTROL AND STABILITY OF DC BIAS IN RF PLASMA-BASED SUBSTRAT...
- Publication number 20150354061
- Publication date Dec 10, 2015
- LAM RESEARCH CORPORATION
- Arul Dhas
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR THE REDUCTION OF DEFECTIVITY IN VAPOR DEPO...
- Publication number 20150203967
- Publication date Jul 23, 2015
- LAM RESEARCH CORPORATION
- Arul N. Dhas
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Person

Patents Grantslast 30 patents

Defect control and stability of DC bias in RF plasma-based substrat...

Defect control and stability of DC bias in RF plasma-based substrat...

Systems and methods for improving deposition rate uniformity and re...

Method and apparatus to minimize seam effect during TEOS oxide film...

Method for the reduction of defectivity in vapor deposited films

Method of eliminating small bin defects in high throughput TEOS films

Method and apparatus to reduce defects in liquid based PECVD films

Method of eliminating small bin defects in high throughput TEOS films

Patents Applicationslast 30 patents

CONTINUOUS PLASMA FOR FILM DEPOSITION AND SURFACE TREATMENT

DC BIAS CIRCUIT AND GAS DELIVERY SYSTEM FOR SUBSTRATE PROCESSING SY...

DEFECT CONTROL AND STABILITY OF DC BIAS IN RF PLASMA-BASED SUBSTRAT...

METHOD AND APPARATUS TO MINIMIZE SEAM EFFECT DURING TEOS OXIDE FILM...

SYSTEMS AND METHODS FOR IMPROVING DEPOSITION RATE UNIFORMITY AND RE...

DEFECT CONTROL AND STABILITY OF DC BIAS IN RF PLASMA-BASED SUBSTRAT...

METHOD AND APPARATUS FOR THE REDUCTION OF DEFECTIVITY IN VAPOR DEPO...