Arul Shanmugasundram

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Milpitas, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Multiple sided robot blade for semiconductor processing equipment
- Patent number 6,648,588
- Issue date Nov 18, 2003
- Applied Materials, Inc.
- Arul Shanmugasundram
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multiple sided robot blade for semiconductor processing equipment
- Patent number 6,481,951
- Issue date Nov 19, 2002
- Applied Materials, Inc.
- Arul Shanmugasundram
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for automatically changing a polishing pad in...
- Patent number 6,379,221
- Issue date Apr 30, 2002
- Applied Materials, Inc.
- Daniel F. Kennedy
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
Multiple sided robot blade for semiconductor processing equipment
- Publication number 20030053903
- Publication date Mar 20, 2003
- APPLIED MATERIALS, INC.
- Arul Shanmugasundram
- H01 - BASIC ELECTRIC ELEMENTS