ARUMUGA BALAN

Follow

Person

Bangalore, IN

People

Patents Grantslast 30 patents

Information Patent Grant
Electrostatic chuck with embossed top plate and cooling channels
- Patent number 10,832,931
- Issue date Nov 10, 2020
- Applied Materials, Inc.
- Chethan Mangalore
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
ELECTROSTATIC CHUCK WITH EMBOSSED TOP PLATE AND COOLING CHANNELS
- Publication number 20150348813
- Publication date Dec 3, 2015
- Applied Materials, Inc.
- CHETHAN MANGALORE
- H01 - BASIC ELECTRIC ELEMENTS