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Arun Ananth Aiyer
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Lewisville, TX, US
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Patents Grants
last 30 patents
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Patent Grant
Self referencing heterodyne reflectometer and method for implementing
Patent number
7,589,843
Issue date
Sep 15, 2009
Verity Instruments, Inc.
Arun Ananth Aiyer
G01 - MEASURING TESTING
Information
Patent Grant
Self referencing heterodyne reflectometer and method for implementing
Patent number
7,545,503
Issue date
Jun 9, 2009
Verity Instruments, Inc.
Arun Ananth Aiyer
G01 - MEASURING TESTING
Information
Patent Grant
Automated overlay metrology system
Patent number
7,368,206
Issue date
May 6, 2008
Nikon Corporation
Bernard Fay
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
Self referencing heterodyne reflectometer and method for implementing
Publication number
20070109551
Publication date
May 17, 2007
Arun Ananth Aiyer
G01 - MEASURING TESTING
Information
Patent Application
Self referencing heterodyne reflectometer and method for implementing
Publication number
20070070357
Publication date
Mar 29, 2007
Arun Ananth Aiyer
G01 - MEASURING TESTING