Arun Keshavamurthy

Person

Bangalore, IN

People

Patents Grantslast 30 patents

Information Patent Grant
Semiconductor substrate processing apparatus including uniformity b...
- Patent number 10,351,955
- Issue date Jul 16, 2019
- Lam Research Corporation
- Arun Keshavamurthy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Systems and methods for inhibiting oxide growth in substrate handle...
- Patent number 9,275,884
- Issue date Mar 1, 2016
- Novellus Systems, Inc.
- Mukul Khosla
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
MICROCHANNEL ASSEMBLY COOLED POWER CIRCUITS FOR POWER BOXES OF SUBS...
- Publication number 20250031344
- Publication date Jan 23, 2025
- LAM RESEARCH CORPORATION
- Ankur PANDEY
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LOCALIZED PLASMA ARC PREVENTION VIA PURGE RING
- Publication number 20230402259
- Publication date Dec 14, 2023
- LAM RESEARCH CORPORATION
- Karl Frederick Leeser
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SHOWERHEADS WITH HIGH SOLIDITY PLENUMS
- Publication number 20230140263
- Publication date May 4, 2023
- Manjunatha H. LAKSHMANA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR CONTROLLING PROCESS WITHIN WAFER UNIFORMITY
- Publication number 20170278679
- Publication date Sep 28, 2017
- LAM RESEARCH CORPORATION
- Ivelin Angelov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR PREVENTING MIXING OF TWO GAS STREAMS IN A P...
- Publication number 20150184292
- Publication date Jul 2, 2015
- LAM RESEARCH CORPORATION
- Arun Keshavamurthy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR SUBSTRATE PROCESSING APPARATUS INCLUDING UNIFORMITY B...
- Publication number 20150167168
- Publication date Jun 18, 2015
- LAM RESEARCH CORPORATION
- Arun Keshavamurthy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEMS AND METHODS FOR INHIBITING OXIDE GROWTH IN SUBSTRATE HANDLE...
- Publication number 20120251271
- Publication date Oct 4, 2012
- Novellus Systems, Inc.
- Mukul Khosla
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Arun Keshavamurthy

Person

Patents Grantslast 30 patents

Semiconductor substrate processing apparatus including uniformity b...

Systems and methods for inhibiting oxide growth in substrate handle...

Patents Applicationslast 30 patents

MICROCHANNEL ASSEMBLY COOLED POWER CIRCUITS FOR POWER BOXES OF SUBS...

LOCALIZED PLASMA ARC PREVENTION VIA PURGE RING

SHOWERHEADS WITH HIGH SOLIDITY PLENUMS

METHOD AND APPARATUS FOR CONTROLLING PROCESS WITHIN WAFER UNIFORMITY

SYSTEMS AND METHODS FOR PREVENTING MIXING OF TWO GAS STREAMS IN A P...

SEMICONDUCTOR SUBSTRATE PROCESSING APPARATUS INCLUDING UNIFORMITY B...

SYSTEMS AND METHODS FOR INHIBITING OXIDE GROWTH IN SUBSTRATE HANDLE...