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Arun Mahadevan Venkataraman
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Norwalk, CT, US
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Patents Grants
last 30 patents
Information
Patent Grant
Catadioptric objective for scatterometry
Patent number
8,982,481
Issue date
Mar 17, 2015
ASML Holding N.V.
Stanislav Y. Smirnov
G02 - OPTICS
Information
Patent Grant
Pulse modifier with adjustable etendue
Patent number
8,625,199
Issue date
Jan 7, 2014
ASML Holding N.V.
Adel Joobeur
G02 - OPTICS
Information
Patent Grant
Pulse stretcher with reduced energy density on optical components
Patent number
8,610,874
Issue date
Dec 17, 2013
ASML Holding N.V.
Arun Mahadevan Venkataraman
G02 - OPTICS
Information
Patent Grant
Pulse modifier with adjustable etendue
Patent number
8,004,770
Issue date
Aug 23, 2011
ASML Holding N.V.
Adel Joobeur
G02 - OPTICS
Patents Applications
last 30 patents
Information
Patent Application
METHOD FOR REGION OF INTEREST PROCESSING FOR RETICLE PARTICLE DETEC...
Publication number
20230055116
Publication date
Feb 23, 2023
ASML Holding N.V.
Peter Conrad KOCHERSPERGER
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Catadioptric Objective for Scatterometry
Publication number
20130170049
Publication date
Jul 4, 2013
ASML Holding N.V.
Stanislav Y. SMIRNOV
G02 - OPTICS
Information
Patent Application
Pulse Modifier with Adjustable Etendue
Publication number
20110255173
Publication date
Oct 20, 2011
ASML NETHERLANDS B.V.
Adel JOOBEUR
G02 - OPTICS
Information
Patent Application
Pulse Stretcher with Reduced Energy Density on Optical Components
Publication number
20100302522
Publication date
Dec 2, 2010
ASML Holding N.V.
Arun Mahadevan VENKATARAMAN
G02 - OPTICS
Information
Patent Application
Pulse Modifier with Adjustable Etendue
Publication number
20100163757
Publication date
Jul 1, 2010
ASML Holding N.V.
Adel Joobeur
G02 - OPTICS