Arun Nagarajan

Person

San Bruno, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Gas insensitive mass flow control systems and methods
- Patent number 10,534,375
- Issue date Jan 14, 2020
- Hitachi Metals, Ltd.
- Ryan Johnson
- G01 - MEASURING TESTING
Information Patent Grant
Gas insensitive mass flow control systems and methods
- Patent number 10,126,761
- Issue date Nov 13, 2018
- Hitachi Metals, Ltd.
- Ryan Johnson
- G01 - MEASURING TESTING
Information Patent Grant
On-tool mass flow controller diagnostic systems and methods
- Patent number 9,846,073
- Issue date Dec 19, 2017
- Hitachi Metals, Ltd.
- Alexei V. Smirnov
- G05 - CONTROLLING REGULATING
Information Patent Grant
Mass flow controller with onboard diagnostics, prognostics, and dat...
- Patent number 9,766,635
- Issue date Sep 19, 2017
- Hitachi Metals, Ltd.
- Alexei V. Smirnov
- G05 - CONTROLLING REGULATING
Information Patent Grant
On-tool mass flow controller diagnostic systems and methods
- Patent number 9,605,992
- Issue date Mar 28, 2017
- Hitachi Metals, Ltd.
- Alexei V. Smirnov
- G05 - CONTROLLING REGULATING
Information Patent Grant
On-tool mass flow controller diagnostic systems and methods
- Patent number 9,488,516
- Issue date Nov 8, 2016
- Hitachi Metals, Ltd.
- Alexei V. Smirnov
- G05 - CONTROLLING REGULATING
Information Patent Grant
Mass flow controller with onboard diagnostics, prognostics, and dat...
- Patent number 9,256,228
- Issue date Feb 9, 2016
- Hitachi Metals, Ltd.
- Alexei V. Smirnov
- G05 - CONTROLLING REGULATING

Patents Applicationslast 30 patents

Information Patent Application
GAS INSENSITIVE MASS FLOW CONTROL SYSTEMS AND METHODS
- Publication number 20180348798
- Publication date Dec 6, 2018
- Hitachi Metals, Ltd.
- Ryan Johnson
- G01 - MEASURING TESTING
Information Patent Application
ON-TOOL MASS FLOW CONTROLLER DIAGNOSTIC SYSTEMS AND METHODS
- Publication number 20170184441
- Publication date Jun 29, 2017
- Hitachi Metals, Ltd.
- Alexei V. Smirnov
- G01 - MEASURING TESTING
Information Patent Application
GAS INSENSITIVE MASS FLOW CONTROL SYSTEMS AND METHODS
- Publication number 20170185091
- Publication date Jun 29, 2017
- Hitachi Metals, Ltd.
- Ryan Johnson
- G01 - MEASURING TESTING
Information Patent Application
MASS FLOW CONTROLLER WITH ONBOARD DIAGNOSTICS, PROGNOSTICS, AND DAT...
- Publication number 20160139609
- Publication date May 19, 2016
- Hitachi Metals, Ltd.
- Alexei V. Smirnov
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
ON-TOOL MASS FLOW CONTROLLER DIAGNOSTIC SYSTEMS AND METHODS
- Publication number 20150260565
- Publication date Sep 17, 2015
- Hitachi Metals, Ltd.
- Alexei V. Smirnov
- G01 - MEASURING TESTING
Information Patent Application
ON-TOOL MASS FLOW CONTROLLER DIAGNOSTIC SYSTEMS AND METHODS
- Publication number 20140260513
- Publication date Sep 18, 2014
- Alexei V. Smirnov
- G01 - MEASURING TESTING
Information Patent Application
MASS FLOW CONTROLLER WITH ONBOARD DIAGNOSTICS, PROGNOSTICS, AND DAT...
- Publication number 20120186655
- Publication date Jul 26, 2012
- Alexei V. Smirnov
- G05 - CONTROLLING REGULATING

Arun Nagarajan

Person

Patents Grantslast 30 patents

Gas insensitive mass flow control systems and methods

Gas insensitive mass flow control systems and methods

On-tool mass flow controller diagnostic systems and methods

Mass flow controller with onboard diagnostics, prognostics, and dat...

On-tool mass flow controller diagnostic systems and methods

On-tool mass flow controller diagnostic systems and methods

Mass flow controller with onboard diagnostics, prognostics, and dat...

Patents Applicationslast 30 patents

GAS INSENSITIVE MASS FLOW CONTROL SYSTEMS AND METHODS

ON-TOOL MASS FLOW CONTROLLER DIAGNOSTIC SYSTEMS AND METHODS

GAS INSENSITIVE MASS FLOW CONTROL SYSTEMS AND METHODS

MASS FLOW CONTROLLER WITH ONBOARD DIAGNOSTICS, PROGNOSTICS, AND DAT...

ON-TOOL MASS FLOW CONTROLLER DIAGNOSTIC SYSTEMS AND METHODS

ON-TOOL MASS FLOW CONTROLLER DIAGNOSTIC SYSTEMS AND METHODS

MASS FLOW CONTROLLER WITH ONBOARD DIAGNOSTICS, PROGNOSTICS, AND DAT...