Arun Ramamoorthy

Person

Milpitas, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Erosion resistance of EUV source electrodes
- Patent number 7,446,329
- Issue date Nov 4, 2008
- Intel Corporation
- Robert Bristol
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Erosion mitigation for collector optics using electric and magnetic...
- Patent number 7,423,275
- Issue date Sep 9, 2008
- Intel Corporation
- Sang Hun Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
In-tool and out-of-tool protection of extreme ultraviolet (EUV) ret...
- Patent number 7,413,586
- Issue date Aug 19, 2008
- Intel Corporation
- Arun Ramamoorthy
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Mechanized retractable pellicles and methods of use
- Patent number 7,102,127
- Issue date Sep 5, 2006
- Intel Corporation
- Arun Ramamoorthy
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Mechanized retractable pellicles and methods of use
- Patent number 6,734,445
- Issue date May 11, 2004
- Intel Corporation
- Arun Ramamoorthy
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Euv reticle carrier with removable pellicle
- Patent number 6,646,720
- Issue date Nov 11, 2003
- Intel Corporation
- Arun Ramamoorthy
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Detection of contaminants on low wavelength masks
- Patent number 6,611,327
- Issue date Aug 26, 2003
- Intel Corporation
- Arun Ramamoorthy
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
In-tool and Out-of-Tool Protection of Extreme Ultraviolet (EUV) Ret...
- Publication number 20080174749
- Publication date Jul 24, 2008
- Intel Corporation
- Arun Ramamoorthy
- B82 - NANO-TECHNOLOGY
Information Patent Application
Minimizing particle contamination of semiconductor wafers during pr...
- Publication number 20060000553
- Publication date Jan 5, 2006
- Arun Ramamoorthy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
In-tool and out-of-tool protection of extreme ultraviolet (EUV) ret...
- Publication number 20050191565
- Publication date Sep 1, 2005
- Arun Ramamoorthy
- B82 - NANO-TECHNOLOGY
Information Patent Application
Erosion mitigation for collector optics using electric and magnetic...
- Publication number 20050155624
- Publication date Jul 21, 2005
- Sang Hun Lee
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Erosion resistance of EUV source electrodes
- Publication number 20050031502
- Publication date Feb 10, 2005
- Robert Bristol
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Mechanized retractable pellicles and methods of use
- Publication number 20040229132
- Publication date Nov 18, 2004
- Intel Corporation
- Arun Ramamoorthy
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Euv reticle carrier with removable pellicle
- Publication number 20030058424
- Publication date Mar 27, 2003
- Arun Ramamoorthy
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Mechanized retractable pellicles and methods of use
- Publication number 20020154285
- Publication date Oct 24, 2002
- Intel Corporation
- Arun Ramamoorthy
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Detection of contaminants on low wavelength masks
- Publication number 20020135759
- Publication date Sep 26, 2002
- Arun Ramamoorthy
- G01 - MEASURING TESTING

Arun Ramamoorthy

Person

Patents Grantslast 30 patents

Erosion resistance of EUV source electrodes

Erosion mitigation for collector optics using electric and magnetic...

In-tool and out-of-tool protection of extreme ultraviolet (EUV) ret...

Mechanized retractable pellicles and methods of use

Mechanized retractable pellicles and methods of use

Euv reticle carrier with removable pellicle

Detection of contaminants on low wavelength masks

Patents Applicationslast 30 patents

In-tool and Out-of-Tool Protection of Extreme Ultraviolet (EUV) Ret...

Minimizing particle contamination of semiconductor wafers during pr...

In-tool and out-of-tool protection of extreme ultraviolet (EUV) ret...

Erosion mitigation for collector optics using electric and magnetic...

Erosion resistance of EUV source electrodes

Mechanized retractable pellicles and methods of use

Euv reticle carrier with removable pellicle

Mechanized retractable pellicles and methods of use

Detection of contaminants on low wavelength masks