Arunima Deya BALAN

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Mountain View, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Selective etch using deposition of a metalloid or metal containing...
- Patent number 12,341,021
- Issue date Jun 24, 2025
- Lam Research Corporation
- Samantha Siamhwa Tan
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
FAST ATOMIC LAYER ETCH
- Publication number 20250210363
- Publication date Jun 26, 2025
- LAM RESEARCH CORPORATION
- Wenbing YANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SELECTIVE ETCH USING DEPOSITION OF A METALLOID OR METAL CONTAINING...
- Publication number 20230118701
- Publication date Apr 20, 2023
- LAM RESEARCH CORPORATION
- Samantha SiamHwa TAN
- H01 - BASIC ELECTRIC ELEMENTS