Arvind Sundaramurthy

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Melno Park, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
EUV phase-shift SRAF masks by means of embedded phase shift layers
- Patent number 11,300,885
- Issue date Apr 12, 2022
- Intel Corporation
- Robert Bristol
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithography mask having sub-resolution phased assist features
- Patent number 9,046,761
- Issue date Jun 2, 2015
- Intel Corporation
- Shem O. Ogadhoh
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
EUV PHASE-SHIFT SRAF MASKS BY MEANS OF EMBEDDED PHASE SHIFT LAYERS
- Publication number 20200033736
- Publication date Jan 30, 2020
- Intel Corporation
- Robert BRISTOL
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHY MASK HAVING SUB-RESOLUTION PHASED ASSIST FEATURES
- Publication number 20130216941
- Publication date Aug 22, 2013
- Shem O. Ogadhoh
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY