Asagi Matsugu

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate transporter and substrate processing apparatus including...
- Patent number 12,237,194
- Issue date Feb 25, 2025
- EBARA CORPORATION
- Akihiro Yazawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, substrate processing method, and st...
- Patent number 11,911,868
- Issue date Feb 27, 2024
- Ebara Corporation
- Takashi Mitsuya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Polishing unit, substrate processing apparatus, and polishing method
- Patent number 11,890,716
- Issue date Feb 6, 2024
- Ebara Corporation
- Akihiro Yazawa
- B24 - GRINDING POLISHING
Information Patent Grant
Laminated membrane, substrate holder including laminated membrane,...
- Patent number 11,638,980
- Issue date May 2, 2023
- Ebara Corporation
- Kenichi Kobayashi
- B24 - GRINDING POLISHING
Information Patent Grant
Top ring for holding a substrate and substrate processing apparatus
- Patent number 11,400,561
- Issue date Aug 2, 2022
- Ebara Corporation
- Kenichi Kobayashi
- B24 - GRINDING POLISHING
Information Patent Grant
Jig for a polishing apparatus
- Patent number 11,305,399
- Issue date Apr 19, 2022
- Ebara Corporation
- Kenichi Kobayashi
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Substrate holding parts
- Patent number D890824
- Issue date Jul 21, 2020
- Ebara Corporation
- Kenichi Kobayashi
- D15 - Machines not elsewhere specified
Information Patent Grant
Substrate holding parts
- Patent number D890825
- Issue date Jul 21, 2020
- Ebara Corporation
- Kenichi Kobayashi
- D15 - Machines not elsewhere specified
Information Patent Grant
Substrate holding parts
- Patent number D890823
- Issue date Jul 21, 2020
- Ebara Corporation
- Kenichi Kobayashi
- D15 - Machines not elsewhere specified
Information Patent Grant
Substrate holding parts
- Patent number D890822
- Issue date Jul 21, 2020
- Ebara Corporation
- Kenichi Kobayashi
- D15 - Machines not elsewhere specified

Patents Applicationslast 30 patents

Information Patent Application
TRANSFER APPARATUS, CLEANING MODULE, AND SUBSTRATE PROCESSING APPAR...
- Publication number 20240001407
- Publication date Jan 4, 2024
- EBARA CORPORATION
- Asagi MATSUGU
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE TRANSPORTER AND SUBSTRATE PROCESSING APPARATUS INCLUDING...
- Publication number 20220005716
- Publication date Jan 6, 2022
- EBARA CORPORATION
- Akihiro Yazawa
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND ST...
- Publication number 20210402548
- Publication date Dec 30, 2021
- EBARA CORPORATION
- Takashi Mitsuya
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING UNIT, SUBSTRATE PROCESSING APPARATUS, AND POLISHING METHOD
- Publication number 20210187692
- Publication date Jun 24, 2021
- EBARA CORPORATION
- Akihiro YAZAWA
- B24 - GRINDING POLISHING
Information Patent Application
LAMINATED MEMBRANE, SUBSTRATE HOLDER INCLUDING LAMINATED MEMBRANE,...
- Publication number 20200316747
- Publication date Oct 8, 2020
- EBARA CORPORATION
- Kenichi Kobayashi
- B24 - GRINDING POLISHING
Information Patent Application
TOP RING FOR HOLDING A SUBSTRATE AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20200039024
- Publication date Feb 6, 2020
- EBARA CORPORATION
- Kenichi Kobayashi
- B24 - GRINDING POLISHING
Information Patent Application
JIG FOR A POLISHING APPARATUS
- Publication number 20200039025
- Publication date Feb 6, 2020
- EBARA CORPORATION
- Kenichi Kobayashi
- B24 - GRINDING POLISHING

Asagi Matsugu

Person

Patents Grantslast 30 patents

Substrate transporter and substrate processing apparatus including...

Substrate processing apparatus, substrate processing method, and st...

Polishing unit, substrate processing apparatus, and polishing method

Laminated membrane, substrate holder including laminated membrane,...

Top ring for holding a substrate and substrate processing apparatus

Jig for a polishing apparatus

Substrate holding parts

Substrate holding parts

Substrate holding parts

Substrate holding parts

Patents Applicationslast 30 patents

TRANSFER APPARATUS, CLEANING MODULE, AND SUBSTRATE PROCESSING APPAR...

SUBSTRATE TRANSPORTER AND SUBSTRATE PROCESSING APPARATUS INCLUDING...

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND ST...

POLISHING UNIT, SUBSTRATE PROCESSING APPARATUS, AND POLISHING METHOD

LAMINATED MEMBRANE, SUBSTRATE HOLDER INCLUDING LAMINATED MEMBRANE,...

TOP RING FOR HOLDING A SUBSTRATE AND SUBSTRATE PROCESSING APPARATUS

JIG FOR A POLISHING APPARATUS