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Asami Obara
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Minato-Ku, JP
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last 30 patents
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Patent Grant
Calibration of plural processing systems
Patent number
7,139,627
Issue date
Nov 21, 2006
Tokyo Electron Limited
Asami Obara
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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last 30 patents
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Patent Application
Processing system
Publication number
20040215365
Publication date
Oct 28, 2004
Asami Obara
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...