Asami Suemura

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Nirasaki, JP

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Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for forming insulating film containing silicon...
- Patent number 6,821,566
- Issue date Nov 23, 2004
- Tokyo Electron Limited
- Genji Nakamura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Method and apparatus for forming insulating film containing silicon...
- Publication number 20030068437
- Publication date Apr 10, 2003
- Genji Nakamura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Oxidation apparatus and method of cleaning the same
- Publication number 20020020433
- Publication date Feb 21, 2002
- Asami Suemura
- C02 - TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE