Asao YAMASHITA

Person

  • Tokyo, JP

Patents Grantslast 30 patents

  • Information Patent Grant

    Differential metal gate etching process

    • Patent number 8,501,628
    • Issue date Aug 6, 2013
    • Tokyo Electron Limited
    • Vinh Hoang Luong
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Dry etching method

    • Patent number 7,192,532
    • Issue date Mar 20, 2007
    • Tokyo Electron Limited
    • Akiteru Koh
    • H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

  • Information Patent Application

    Differential metal gate etching process

    • Publication number 20110237084
    • Publication date Sep 29, 2011
    • TOKYO ELECTRON LIMITED
    • Vinh Hoang LUONG
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Etching method

    • Publication number 20050106868
    • Publication date May 19, 2005
    • Asao Yamashita
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Dry etching method

    • Publication number 20050045588
    • Publication date Mar 3, 2005
    • Akiteru Koh
    • H01 - BASIC ELECTRIC ELEMENTS