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Asao YAMASHITA
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Tokyo, JP
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Patents Grants
last 30 patents
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Patent Grant
Differential metal gate etching process
Patent number
8,501,628
Issue date
Aug 6, 2013
Tokyo Electron Limited
Vinh Hoang Luong
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Dry etching method
Patent number
7,192,532
Issue date
Mar 20, 2007
Tokyo Electron Limited
Akiteru Koh
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
Differential metal gate etching process
Publication number
20110237084
Publication date
Sep 29, 2011
TOKYO ELECTRON LIMITED
Vinh Hoang LUONG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Etching method
Publication number
20050106868
Publication date
May 19, 2005
Asao Yamashita
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Dry etching method
Publication number
20050045588
Publication date
Mar 3, 2005
Akiteru Koh
H01 - BASIC ELECTRIC ELEMENTS