Ashish GOEL

Person

Bangalore, IN

People

Patents Grantslast 30 patents

Information Patent Grant
High-temperature substrate support assembly with failure protection
- Patent number 12,185,433
- Issue date Dec 31, 2024
- Applied Materials, Inc.
- Denis Martin Koosau
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
UHV in-situ cryo-cool chamber
- Patent number 11,802,340
- Issue date Oct 31, 2023
- Applied Materials, Inc.
- Bharath Swaminathan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition system with multi-cathode and method of manufacture thereof
- Patent number 11,600,476
- Issue date Mar 7, 2023
- Applied Materials, Inc.
- Anantha K. Subramani
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition system with multi-cathode and method of manufacture thereof
- Patent number 11,183,375
- Issue date Nov 23, 2021
- Applied Materials, Inc.
- Anantha K. Subramani
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and apparatus for co-sputtering multiple targets
- Patent number 11,101,117
- Issue date Aug 24, 2021
- Applied Materials, Inc.
- Anantha K. Subramani
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process kit for multi-cathode processing chamber
- Patent number 11,043,364
- Issue date Jun 22, 2021
- Applied Materials, Inc.
- Hanbing Wu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and apparatus for multi-cathode substrate processing
- Patent number 11,011,357
- Issue date May 18, 2021
- Applied Materials, Inc.
- Hanbing Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cooled reflective adapter plate for a deposition chamber
- Patent number 10,903,067
- Issue date Jan 26, 2021
- Applied Materials, Inc.
- Ashish Goel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cooled reflective adapter plate for a deposition chamber
- Patent number 10,504,719
- Issue date Dec 10, 2019
- Applied Materials, Inc.
- Ashish Goel
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and apparatus for co-sputtering multiple targets
- Patent number 10,468,238
- Issue date Nov 5, 2019
- Applied Materials, Inc.
- Anantha K. Subramani
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Reflective deposition rings and substrate processing chambers incor...
- Patent number 9,905,443
- Issue date Feb 27, 2018
- Applied Materials, Inc.
- Anantha K. Subramani
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for microwave assisted chalcogen radicals gene...
- Patent number 9,879,341
- Issue date Jan 30, 2018
- Applied Materials, Inc.
- Kaushal K. Singh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Rotatable heated electrostatic chuck
- Patent number 9,853,579
- Issue date Dec 26, 2017
- Applied Materials, Inc.
- Anantha K. Subramani
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Edge ring for a deposition chamber
- Patent number 9,376,752
- Issue date Jun 28, 2016
- Applied Materials, Inc.
- Ashish Goel
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
HIGH-TEMPERATURE SUBSTRATE SUPPORT ASSEMBLY WITH FAILURE PROTECTION
- Publication number 20230380016
- Publication date Nov 23, 2023
- Applied Materials, Inc.
- Denis Martin Koosau
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
HIGH-TEMPERATURE SUBSTRATE SUPPORT ASSEMBLY WITH FAILURE PROTECTION
- Publication number 20230377930
- Publication date Nov 23, 2023
- Applied Materials, Inc.
- Denis Martin Koosau
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Deposition System With Multi-Cathode And Method Of Manufacture Thereof
- Publication number 20220037136
- Publication date Feb 3, 2022
- Applied Materials, Inc.
- Anantha K. Subramani
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COOLED REFLECTIVE ADAPTER PLATE FOR A DEPOSITION CHAMBER
- Publication number 20200098559
- Publication date Mar 26, 2020
- Applied Materials, Inc.
- Ashish GOEL
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND APPARATUS FOR CO-SPUTTERING MULTIPLE TARGETS
- Publication number 20200013597
- Publication date Jan 9, 2020
- Applied Materials, Inc.
- Anantha K. SUBRAMANI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESS KIT FOR MULTI-CATHODE PROCESSING CHAMBER
- Publication number 20180350572
- Publication date Dec 6, 2018
- Hanbing Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND APPARATUS FOR MULTI-CATHODE SUBSTRATE PROCESSING
- Publication number 20180240655
- Publication date Aug 23, 2018
- HANBING WU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
UHV In-Situ Cryo-Cool Chamber
- Publication number 20180163306
- Publication date Jun 14, 2018
- Applied Materials, Inc.
- Bharath Swaminathan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND APPARATUS FOR CO-SPUTTERING MULTIPLE TARGETS
- Publication number 20170053784
- Publication date Feb 23, 2017
- Applied Materials, Inc.
- Anantha K. SUBRAMANI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR MICROWAVE ASSISTED CHALCOGEN RADICALS GENE...
- Publication number 20160372351
- Publication date Dec 22, 2016
- Applied Materials, Inc.
- Kaushal K. SINGH
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION SYSTEM WITH MULTI-CATHODE AND METHOD OF MANUFACTURE THEREOF
- Publication number 20150279635
- Publication date Oct 1, 2015
- Applied Materials, Inc.
- Anantha K. Subramani
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ROTATABLE HEATED ELECTROSTATIC CHUCK
- Publication number 20150170952
- Publication date Jun 18, 2015
- Applied Materials, Inc.
- ANANTHA K. SUBRAMANI
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Application
COOLED REFLECTIVE ADAPTER PLATE FOR A DEPOSITION CHAMBER
- Publication number 20130284096
- Publication date Oct 31, 2013
- Ashish GOEL
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
EDGE RING FOR A DEPOSITION CHAMBER
- Publication number 20130264035
- Publication date Oct 10, 2013
- Ashish GOEL
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
REFLECTIVE DEPOSITION RINGS AND SUBSTRATE PROCESSING CHAMBERS INCOR...
- Publication number 20130055952
- Publication date Mar 7, 2013
- Applied Materials, Inc.
- ANANTHA K. SUBRAMANI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Ashish GOEL

Person

Patents Grantslast 30 patents

High-temperature substrate support assembly with failure protection

UHV in-situ cryo-cool chamber

Deposition system with multi-cathode and method of manufacture thereof

Deposition system with multi-cathode and method of manufacture thereof

Methods and apparatus for co-sputtering multiple targets

Process kit for multi-cathode processing chamber

Methods and apparatus for multi-cathode substrate processing

Cooled reflective adapter plate for a deposition chamber

Cooled reflective adapter plate for a deposition chamber

Methods and apparatus for co-sputtering multiple targets

Reflective deposition rings and substrate processing chambers incor...

Method and apparatus for microwave assisted chalcogen radicals gene...

Rotatable heated electrostatic chuck

Edge ring for a deposition chamber

Patents Applicationslast 30 patents

HIGH-TEMPERATURE SUBSTRATE SUPPORT ASSEMBLY WITH FAILURE PROTECTION

HIGH-TEMPERATURE SUBSTRATE SUPPORT ASSEMBLY WITH FAILURE PROTECTION

Deposition System With Multi-Cathode And Method Of Manufacture Thereof

COOLED REFLECTIVE ADAPTER PLATE FOR A DEPOSITION CHAMBER

METHODS AND APPARATUS FOR CO-SPUTTERING MULTIPLE TARGETS

PROCESS KIT FOR MULTI-CATHODE PROCESSING CHAMBER

METHODS AND APPARATUS FOR MULTI-CATHODE SUBSTRATE PROCESSING

UHV In-Situ Cryo-Cool Chamber

METHODS AND APPARATUS FOR CO-SPUTTERING MULTIPLE TARGETS

METHOD AND APPARATUS FOR MICROWAVE ASSISTED CHALCOGEN RADICALS GENE...

DEPOSITION SYSTEM WITH MULTI-CATHODE AND METHOD OF MANUFACTURE THEREOF

ROTATABLE HEATED ELECTROSTATIC CHUCK

COOLED REFLECTIVE ADAPTER PLATE FOR A DEPOSITION CHAMBER

EDGE RING FOR A DEPOSITION CHAMBER

REFLECTIVE DEPOSITION RINGS AND SUBSTRATE PROCESSING CHAMBERS INCOR...