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Ashok Das
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Cupertino, CA, US
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last 30 patents
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Patent Application
Nozzle for introduction of reactive species in remote plasma cleani...
Publication number
20020179247
Publication date
Dec 5, 2002
Matthew F. Davis
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Application
Remote plasma cleaning of pumpstack components of a reactor chamber
Publication number
20020144706
Publication date
Oct 10, 2002
Matthew F. Davis
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...