Ashwin M. Purohit

Person

Gloucester, MA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Vapor compression refrigeration chuck for ion implanters
- Patent number 9,558,980
- Issue date Jan 31, 2017
- Axcelis Technologies, Inc.
- William D. Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-resistivity Johnsen-Rahbek electrostatic clamp
- Patent number 9,281,227
- Issue date Mar 8, 2016
- Axcelis Technologies, Inc.
- William D. Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Matched coefficient of thermal expansion for an electrostatic chuck
- Patent number 9,048,276
- Issue date Jun 2, 2015
- Axcelis Technologies, Inc.
- William D. Lee
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Gas bearing electrostatic chuck
- Patent number 9,036,326
- Issue date May 19, 2015
- Axcelis Technologies, Inc.
- William David Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heated electrostatic chuck including mechanical clamp capability at...
- Patent number 8,941,968
- Issue date Jan 27, 2015
- Axcelis Technologies, Inc.
- Perry J. I. Justesen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic chuck ground punch
- Patent number 8,902,560
- Issue date Dec 2, 2014
- Axcelis Technologies, Inc.
- David B. Smith
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heated annulus chuck
- Patent number 8,797,706
- Issue date Aug 5, 2014
- Axcelis Technologies, Inc.
- William Davis Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Annulus clamping and backside gas cooled electrostatic chuck
- Patent number 8,422,193
- Issue date Apr 16, 2013
- Axcelis Technologies, Inc.
- Teng Chao D. Tao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
De-clamping wafers from an electrostatic chuck
- Patent number 8,270,142
- Issue date Sep 18, 2012
- Axcelis Technologies, Inc.
- William D. Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Non-condensing thermos chuck
- Patent number 8,241,425
- Issue date Aug 14, 2012
- Axcelis Technologies, Inc.
- William D. Lee
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Variable frequency electrostatic clamping
- Patent number 8,228,658
- Issue date Jul 24, 2012
- Axcelis Technologies, Inc.
- Ashwin M. Purohit
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Electrostatic chuck with compliant coat
- Patent number 8,023,247
- Issue date Sep 20, 2011
- Axcelis Technologies, Inc.
- Ashwin M. Purohit
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Wafer grounding method for electrostatic clamps
- Patent number 7,952,851
- Issue date May 31, 2011
- Axcelis Technologies, Inc.
- Marvin R. LaFontaine
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sliding wafer release gripper/wafer peeling gripper
- Patent number 7,751,172
- Issue date Jul 6, 2010
- Axcelis Technologies, Inc.
- Ashwin M. Purohit
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Workpiece handling scan arm for ion implantation system
- Patent number 7,560,705
- Issue date Jul 14, 2009
- Axcelis Technologies, Inc.
- Ari Eiriksson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Offset phase operation on a multiphase AC electrostatic clamp
- Patent number 7,385,799
- Issue date Jun 10, 2008
- Axcelis Technology, Inc.
- Ashwin M. Purohit
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Ion beam incidence angle and beam divergence monitor
- Patent number 6,690,022
- Issue date Feb 10, 2004
- Varian Semiconductor Equipment Associates, Inc.
- Grant Kenji Larsen
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Multi-Resistivity Johnsen-Rahbek Electrostatic Clamp
- Publication number 20150002983
- Publication date Jan 1, 2015
- Axcelis Technologies, Inc.
- William D. Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HEATED ANNULUS CHUCK
- Publication number 20110299218
- Publication date Dec 8, 2011
- Axcelis Technologies, Inc.
- William Davis Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HEATED ELECTROSTATIC CHUCK INCLUDING MECHANICAL CLAMP CAPABILITY AT...
- Publication number 20110299217
- Publication date Dec 8, 2011
- Axcelis Technologies, Inc.
- Perry J.I. Justesen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MATCHED COEFFICIENT OF THERMAL EXPANSION FOR AN ELECTROSTATIC CHUCK
- Publication number 20110292562
- Publication date Dec 1, 2011
- Axcelis Technologies, Inc.
- William D. Lee
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
NON-CONDENSING THERMOS CHUCK
- Publication number 20100187447
- Publication date Jul 29, 2010
- Axcelis Technologies, Inc.
- William D. Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Vapor Compression Refridgeration Chuck for Ion Implanters
- Publication number 20100171044
- Publication date Jul 8, 2010
- Axcelis Technologies, Inc.
- William D. Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CHUCK WITH COMPLIANT COAT
- Publication number 20100142114
- Publication date Jun 10, 2010
- Axcelis Technologies, Inc.
- Ashwin M. Purohit
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DE-CLAMPING WAFERS FROM AN ELECTROSTATIC CHUCK
- Publication number 20100142113
- Publication date Jun 10, 2010
- Axcelis Technologies, Inc.
- William D. Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CHUCK GROUND PUNCH
- Publication number 20100110604
- Publication date May 6, 2010
- Axcelis Technologies, Inc.
- David B. Smith
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER GROUNDING METHOD FOR ELECTROSTATIC CLAMPS
- Publication number 20100110603
- Publication date May 6, 2010
- Axcelis Technologies, Inc.
- Marvin R. LaFontaine
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS BEARING ELECTROSTATIC CHUCK
- Publication number 20090273878
- Publication date Nov 5, 2009
- Axcelis Technologies, Inc.
- William David Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Variable frequency electrostatic clamping
- Publication number 20080192405
- Publication date Aug 14, 2008
- Axcelis Technologies, Inc.
- Ashwin M. Purohit
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Annulus clamping and backside gas cooled electrostatic chuck
- Publication number 20080144251
- Publication date Jun 19, 2008
- Axcelis Technologies, Inc.
- Teng Chao D. Tao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WORKPIECE HANDLING SCAN ARM FOR ION IMPLANTATION SYSTEM
- Publication number 20080105836
- Publication date May 8, 2008
- Ari Eiriksson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Sliding wafer release gripper / wafer peeling gripper
- Publication number 20080100983
- Publication date May 1, 2008
- Axcelis Technologies, Inc.
- Ashwin M. Purohit
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
In situ ion beam incidence angle and beam divergence monitor
- Publication number 20020121889
- Publication date Sep 5, 2002
- Varian Semiconductor Equipment Associates, Inc.
- Grant Kenji Larsen
- H01 - BASIC ELECTRIC ELEMENTS

Ashwin M. Purohit

Person

Patents Grantslast 30 patents

Vapor compression refrigeration chuck for ion implanters

Multi-resistivity Johnsen-Rahbek electrostatic clamp

Matched coefficient of thermal expansion for an electrostatic chuck

Gas bearing electrostatic chuck

Heated electrostatic chuck including mechanical clamp capability at...

Electrostatic chuck ground punch

Heated annulus chuck

Annulus clamping and backside gas cooled electrostatic chuck

De-clamping wafers from an electrostatic chuck

Non-condensing thermos chuck

Variable frequency electrostatic clamping

Electrostatic chuck with compliant coat

Wafer grounding method for electrostatic clamps

Sliding wafer release gripper/wafer peeling gripper

Workpiece handling scan arm for ion implantation system

Offset phase operation on a multiphase AC electrostatic clamp

Ion beam incidence angle and beam divergence monitor

Patents Applicationslast 30 patents

Multi-Resistivity Johnsen-Rahbek Electrostatic Clamp

HEATED ANNULUS CHUCK

HEATED ELECTROSTATIC CHUCK INCLUDING MECHANICAL CLAMP CAPABILITY AT...

MATCHED COEFFICIENT OF THERMAL EXPANSION FOR AN ELECTROSTATIC CHUCK

NON-CONDENSING THERMOS CHUCK

Vapor Compression Refridgeration Chuck for Ion Implanters

ELECTROSTATIC CHUCK WITH COMPLIANT COAT

DE-CLAMPING WAFERS FROM AN ELECTROSTATIC CHUCK

ELECTROSTATIC CHUCK GROUND PUNCH

WAFER GROUNDING METHOD FOR ELECTROSTATIC CLAMPS

GAS BEARING ELECTROSTATIC CHUCK

Variable frequency electrostatic clamping

Annulus clamping and backside gas cooled electrostatic chuck

WORKPIECE HANDLING SCAN ARM FOR ION IMPLANTATION SYSTEM

Sliding wafer release gripper / wafer peeling gripper

In situ ion beam incidence angle and beam divergence monitor