Ashwin Shetty

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Burlington, MA, US

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Patents Grantslast 30 patents

Information Patent Grant
Magnetic monitoring of a Faraday cup for an ion implanter
- Patent number 7,521,691
- Issue date Apr 21, 2009
- Varian Semiconductor Equipment Associates, Inc.
- Joseph P. Dzengeleski
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
MAGNETIC MONITORING OF A FARADAY CUP FOR AN ION IMPLANTER
- Publication number 20080135776
- Publication date Jun 12, 2008
- Joseph P. Dzengeleski
- G01 - MEASURING TESTING