Atsuhiko Kato

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Tokyo, JP

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Patents Grantslast 30 patents

Information Patent Grant
Method and system for optimizing alignment performance in a fleet o...
- Patent number 7,679,069
- Issue date Mar 16, 2010
- KLA-Tencor Technologies Corporation
- Michael E. Adel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
METHOD AND SYSTEM FOR OPTIMIZING ALIGNMENT PERFORMANCE IN A FLEET O...
- Publication number 20080073589
- Publication date Mar 27, 2008
- KLA-Tencor Technologies Corporation
- Michael E. Adel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY